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Processing equipment, conveying control device and conveying control method

A technology for conveying control and processing devices, which is applied in the direction of conveyor control devices, program control in sequence/logic controllers, conveyors, etc., which can solve problems such as longer development cycles and increased product volumes, and reduce the amount of products in progress , reduce the frequency of occurrence, and reduce the effect of the development cycle time

Inactive Publication Date: 2012-06-20
IHI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0021] However, in the conventional processing equipment that transports each storage tank, since the transport is not performed when a certain amount of objects to be transported is not inserted into the storage tank, the amount of work in progress increases and the development cycle becomes longer. The problem

Method used

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  • Processing equipment, conveying control device and conveying control method
  • Processing equipment, conveying control device and conveying control method
  • Processing equipment, conveying control device and conveying control method

Examples

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no. 1 approach

[0074] figure 1 It is a side view showing the structure of the first embodiment of the processing equipment of the present invention

[0075] In the processing device of this embodiment, as figure 1 As shown, there are a plurality of conveyance paths for conveyed objects among the plurality of processing devices 101 , 102 , 103 , and 104 . Also, along this conveyance path, a plurality of conveyors with a branching function (hereinafter referred to as branching conveyors, FCV: conveying unit) 107a, 7, 107b, 107c, 107d for conveying substrates (objects to be conveyed) 111 are provided. . The plurality of substrates 111 are made to correspond to the branch conveyors 107a, 7, 107b, 107c, and 107d.

[0076] In this processing facility, each processing apparatus 101, 102, 103, 104 and each branch conveyor 107a, 7, 107b, 107c, 107d are installed in multiple stages. The first processing device 101 and the third processing device 103 are provided in the upper stage, and the second ...

no. 3 approach

[0096] image 3 It is a side view showing the structure of the third embodiment of the processing facility of the present invention.

[0097] In the processing device of this embodiment, if image 3 As shown, the processing device and the branch conveyor are arranged in three stages. That is, in this processing facility, the first and second processing devices 101 and 102 are provided at the upper stage, the third and fourth processing devices 103 and 104 are provided at the middle stage, and the fifth and sixth processing devices 115 and 116 are provided at the lower stage. In addition, the first to third branch conveyors 107a, 107b, and 107c are installed in the upper stage, the fourth to sixth branch conveyors 107d, 107e, and 107f are installed in the middle stage, and the seventh to ninth branch conveyors 107g and 107h are installed in the lower stage. , 107i.

[0098] In this processing facility, the board|substrate 111 is carried in to the 1st branch conveyor 107a fro...

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Abstract

A processing equipment is provided with a plurality of conveying paths between processing devices. The processing equipment weights separately a standby time of each object to be conveyed at each time, the load conditions of processing devices of a conveying destination and a conveying source, the entire load condition of the conveying zone of each object to be conveyed, and the load condition of each conveying means. The priority of each conveying treatment is calculated by the weighting variations corresponding to the condition of the conveying zone so as to determine which object should be conveyed to the processing devices in order to control the conveying means. The processing equipment will not become large-sized, will not increase the capacity or lead time, and has enough conveying ability. Based on the processing equipment, even if the load of the object to be conveyed to a conveying destination becomes higher, it is capable of shortening the production pitch time of the whole processing device. Based on the processing equipment, even if the conveying line is a vane-type conveying line, the data amount of processing operations will not be increased. It does not need to adopt large-scale operation processing device and can shorten the processing time of operation.

Description

[0001] This application is a divisional application of the patent application submitted on June 22, 2009, with the application number 200910142508.4, and the title of the invention is "processing equipment, transportation control device and transportation control method". technical field [0002] The present invention relates to a processing facility having a transport unit for transporting objects to be transported on these transport paths when there are transport paths for objects to be transported such as a plurality of substrates between a plurality of processing apparatuses, and a method of controlling the transport unit of the processing apparatus A transport control device, a transport control method for controlling a transport unit of the processing facility. Background technique [0003] Conventionally, there is a processing facility in which there are a plurality of conveying paths that branch or merge conveyed objects such as substrates between a plurality of proce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G37/00B65G49/06B65G49/07B65G47/52B65G43/00B65G43/10G05B19/04H01L21/677
Inventor 志田伦教
Owner IHI CORP
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