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Electron multiplier dynode surface coating base plate frame

A technology of electron multiplier and dynode, which is applied in the field of surface engineering to achieve the effect of uniformity of film formation and accurate installation

Active Publication Date: 2012-06-27
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a substrate frame for the dynapolar curved surface coating of an electron multiplier, which can quickly and accurately install the dynapolar curved surface substrate, and effectively solve the problems of film formation uniformity and stability in the dynapolar curved surface coating

Method used

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  • Electron multiplier dynode surface coating base plate frame
  • Electron multiplier dynode surface coating base plate frame
  • Electron multiplier dynode surface coating base plate frame

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Embodiment

[0026] An electron multiplier dynamo polar surface coating substrate frame, the substrate frame 1 is a disk, and one or more I-shaped holes are equally spaced on the disk; the center of all the I-shaped holes reaches the circle The distance from the center of the disc is equal;

[0027] Along the x-axis direction, the hole length of the I-shaped hole is 20mm;

[0028] Along the y-axis direction, the two ends of the I-shaped hole are respectively provided with the upper outer protrusion and the lower outer protrusion of the hole. The upper outer protrusion is 15mm long and 15mm wide, and the lower outer protrusion is 15mm long and 9mm wide; I-shaped The width of the middle part of the hole is 8mm;

[0029] Along the z-axis direction, two symmetrical side plates 2 are respectively provided under the two sides of the middle part of the I-shaped hole, and the two side plates 2 are perpendicular to and merged with the base frame 1; the side plates 2 are triangular, with a, b, c t...

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Abstract

The invention relates to an electron multiplier dynode surface coating base plate frame, belonging to the field of surface engineering. The electron multiplier dynode surface coating base plate frame is characterized in that the base plate frame is a disc, the disc is provided with one or more I-shaped holes at regular intervals; two ends of the I-shaped hole are respectively provided with the upper boss and the lower boss of the holes, two symmetric side plates are arranged below the two sides of the central portion of the I-shaped hole, the two side plates are arranged vertically to the base plate frame and are fused with the base plate frame; the side plates are trigonal, the two side plates are provided with parallel slideways; the slideway depth is less than the side plate thickness,and the side plate thickness is larger than the dynode tab width; and the slideway gradient is equal to the A'C' line gradient. According to the invention, the film forming uniformity and stability in dynode surface coating can be achieved, and simultaneously dynode special surface substrates can be rapidly and accurately installed.

Description

technical field [0001] The invention relates to an electron multiplier dynapolar curved surface coating substrate frame, which belongs to the field of surface engineering. Background technique [0002] There are one or more substrate mounting racks in the vacuum coating equipment, which are convenient for fixing the substrates to be coated. In the process of coating thin films, it is necessary to design the base frame according to the shape and size of the substrate to meet the coating requirements. However, in the actual development and production of thin films, flat substrates are commonly used, and the base frame design can be Design and process different substrate holders according to the requirements of different users on the shape, thickness and other dimensions of the final film substrate, but the design of the substrate holder for the coating of curved substrates is more troublesome. The electron multiplier has a very special coating, and its substrate is non-planar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50
Inventor 李晨王多书熊玉卿陈焘王济洲张玲董茂进
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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