Sputtering coating device
A technology of sputtering and driving device, which is applied in the field of vacuum coating, can solve the problems of increased cost, unusable ring material rack, and inability to accommodate the coating machine in the ring material rack, so as to reduce the production cost and reduce the cost of mold opening. Effect
Inactive Publication Date: 2012-07-04
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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- Description
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- Application Information
AI Technical Summary
Problems solved by technology
However, ring racks generally cannot be used in different coaters
Specifically, the size of the ring material rack may be larger than the size of some types of coating machines, so that the ring material rack cannot be accommodated in the coating machine
For this reason, manufacturers need to open molds to produce material racks of corresponding sizes according to the size of different coating machines, resulting in increased costs
Method used
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Embodiment Construction
[0046] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0047] see figure 1 and figure 2 , is a sputtering device 100 provided in an embodiment of the present invention, which includes a body 10 , two targets 20 , a bias electrode 30 , a carrying device 50 and a driving device 60 .
[0048] The main body 10 defines a coating chamber 11 , and includes a top plate 101 , a bottom plate 102 and a side wall 103 connecting the top plate 101 and the bottom plate 102 . The top board 101 is opposite to and parallel to the bottom board 102 . The side wall 103 connects the top board 101 and the bottom board 102 .
[0049] The two targets 20 are oppositely disposed on the inner surface of the side wall 103 . In this embodiment, the target material 20 is titanium, and positively charged titanium ions are sputtered out after being bombarded by electron beams.
[0050] The bias electrode 30 is fixed in the coating chamber ...
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The invention relates to a sputtering coating device, which comprises a hollow body and a bearing device and a drive device accommodated in the body. The body comprises a top plate and a bottom plate which are opposite. The bearing device comprises a circular ring rack, a circular ring base and a plurality of bars. The circular ring rack is fixedly arranged on the top plate and is formed by connecting at least one flexible assembling plate. The circular ring base is rotatably arranged on the bottom plate and is coaxially arranged with the circular ring rack. The bars are arranged along the axial direction of the circular ring base, are distributed along the circumferential direction of the circular ring base and are connected with the circular ring rack and the circular ring base. The drive device is connected with the circular ring base and the bars, and is used for driving the circular ring base and the bars to rotate around respective central axis. The circular ring rack of the sputtering coating device is formed by connecting at least one flexible assembling plate, so that the opening mold cost is reduced, and the production cost is decreased.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a sputtering device. Background technique [0002] A sputtering device generally includes a circular material shelf, a circular base and a plurality of material rods. The ring material rack is arranged coaxially with the ring base. A plurality of material rods are arranged along the axial direction of the ring base, arranged along the circumferential direction of the ring base, and connected with the ring material rack and the ring base. During coating, the target ions shoot from the outside of the material rod to the material rod and attach to the surface of the workpiece to be plated. However, ring racks generally cannot be used in different coaters. Specifically, the size of the ring material rack may be larger than that of some types of coating machines, so that the ring material rack cannot be accommodated in the coating machine. For this reason, manufacturers nee...
Claims
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Inventor 王仲培
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD