Method for manufacturing light ray filtering structure
A filtering structure and light technology, applied in optics, optical components, radiation control devices, etc., can solve the problems of ineffective customization and increase costs, and achieve the effect of saving costs and reducing usage
Inactive Publication Date: 2012-07-04
SITRONIX TECH CORP
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Problems solved by technology
In this way, due to the influence of the interference layer of each Fabry-Perot cavity structure on the bottom layer of the subsequent Fabry-Perot cavity structure, the designer cannot effectively customize the passage of light of three different wavelengths. Optical filters, and the interference layer of each Fabry-Perot cavity structure is related to the bottom layer of the subsequent Fabry-Perot cavity structure, and multiple masks must be used, thereby increasing the cost of production
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[0076] In order to have a further understanding and understanding of the structural features of the present invention and the achieved effects, the preferred embodiments and accompanying drawings are used for a detailed description, as follows:
[0077] see figure 2 , is a flowchart of a preferred embodiment of the present invention. As shown in the figure, the method for fabricating a light filtering structure of the present invention is to first perform step S10 to provide a wafer, and the wafer includes a plurality of base layers 10, that is, as Figure 3A As shown, in this embodiment, some base layers 10 of the base layers 10 of the wafer are taken as an example, and then step S12 is performed to provide one of the base layers, the base layer 10 includes a first photodiode 12 and a first photodiode 12 Two photodiodes 14 (such as Figure 3E shown). Afterwards, step S16 is executed to form a first filter structure 20 (such as Figure 3E shown) above the base layer 10, a...
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The invention relates to a method for manufacturing a light ray filtering structure, which comprises the following steps of: providing a substrate, wherein the substrate comprises a first photodiode and a second photodiode; then forming a first filtering structure above the substrate according to the wavelength of a light ray, wherein the first filtering structure is correspondingly arranged above the first photodiode; and subsequently, forming a second filtering structure above the substrate according to the wavelength of the light ray, wherein the second filtering structure is correspondingly arranged above the second photodiode, and the first filtering structure and the second filtering structure are individually and independently formed above the first photodiode and the second photodiode. Therefore, the purpose of customizing the light ray filtering structure is achieved by individually and independently forming the first filtering structure and the second filtering structure above the first photodiode and the second photodiode, the use of a mask can be reduced, and the cost is further saved.
Description
technical field [0001] The invention relates to a method for manufacturing a light filter structure, in particular to a method for making a light filter structure that can be customized and saves the use of photomasks. Background technique [0002] Light detectors have been widely used in various fields, such as industry, mobile phones, electronic devices, and retail automation. The light detector can detect a variety of different ambient brightness, and output different electronic signals corresponding to different brightness, so that the back-end circuit can know the current ambient brightness according to the electronic signal. At present, light detectors are most commonly used in LCD backlight control of mobile phones, LCD screens / panels and notebook computers that are currently on the market. The light detector is used to detect the luminosity in the current environment, so that the back-end circuit can adjust the brightness of the screen according to the detected brig...
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IPC IPC(8): H01L27/146G02B5/28H01L31/0216
Inventor 李竹盛
Owner SITRONIX TECH CORP