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Non-leaded package structure and manufacturing method thereof

A technology of packaging structure and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device parts, semiconductor devices, etc., can solve the problem that the lead frame is difficult to achieve the number of pins, and achieve the effect of improving reliability

Active Publication Date: 2012-07-11
CHIPMOS TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is difficult for the lead frame used by the four-square / two-square flat no outer pin to achieve the number of pins other than a single row. Therefore, when users have higher and higher requirements for the pin density of the lead frame, how to use the package technology to form the required pin density is a problem to be solved

Method used

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  • Non-leaded package structure and manufacturing method thereof
  • Non-leaded package structure and manufacturing method thereof
  • Non-leaded package structure and manufacturing method thereof

Examples

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Embodiment Construction

[0055] Figure 1A to Figure 1E It is a schematic cross-sectional view of a manufacturing method of a packaging structure without external leads according to an embodiment of the present invention. Please refer to Figures 2A-2C ,in, Figure 2A for Figure 1A A schematic cross-sectional view of the first concave portion and the second concave portion at the imaginary circle, Figure 2B for Figure 1A A schematic top view of the first recess and the second recess of an embodiment at the imaginary circle, and Figure 2C for Figure 1A A schematic top view of the first concave portion and the second concave portion of another embodiment at the imaginary circle, the manufacturing method of the package structure without external leads of this embodiment includes the following steps. First, please refer to Figure 1A , providing a metal substrate 110 . In detail, the metal substrate 110 of this embodiment has an upper surface 111 a and a lower surface 111 b opposite to each othe...

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Abstract

The invention provides a non-leaded package structure and a manufacturing method thereof. The manufacturing method comprises providing a metal base plate which has an upper surface and a lower surface opposite to each other. The upper surface and the lower surface of a metal base plate are patterned so as to form a plurality of first protruding parts and at least a second protruding part on the upper surface and to form a plurality of first recess patterns on the lower surface corresponding to the first protruding parts. A first solder layer is formed in each of the first recess patterns respectively. A chip is mounted on the second protruding part. A plurality of bonding wires are formed for electrically connecting the chip to the first protruding parts respectively. An encapsulant is formed on the upper surface of the metal base plate. A back etching process is performed on the lower surface of the metal base plate with the first solder layer serving as an etch mask to partially remove the metal base plate until the encapsulant is exposed and a lead group is defined, wherein the lead group comprises at least a die pad carrying the chip and a plurality of leads isolated to one another.

Description

technical field [0001] The present invention relates to a package structure without external leads, and in particular to a quad / dual flat non-leaded package (Quad / Dual Flat Non-leaded package, QFN / DFN package) with protruding leads structure and method of manufacture. Background technique [0002] Semiconductor packaging technology includes many packaging forms, among which the quad / two-square flat no-lead package belonging to the flat package series has a short signal transmission path and relatively fast signal transmission speed, so the four-square / two-square flat no-lead The pin package is suitable for high-frequency transmission (such as radio frequency band) chip package, and is one of the mainstream low pin count (low pin count) package types. [0003] In the process of QFNP, a plurality of chips are firstly arranged on a planar leadframe. Then, the chip is electrically connected to the lead frame by a plurality of wires. Finally, part of the lead frame, wires and ...

Claims

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Application Information

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IPC IPC(8): H01L21/50H01L21/60H01L21/56H01L23/31H01L23/488
CPCH01L21/4832H01L2224/32245H01L23/49541H01L2224/49052H01L21/50H01L2224/73265H01L23/3107H01L21/56H01L23/495H01L21/568H01L23/49582H01L2224/48091H01L24/49H01L23/31H01L23/49548H01L2924/00013H01L2924/01029H01L2224/48247H01L2224/48465H01L23/488H01L2924/3025H01L2224/48245H01L2224/45099H01L2924/01079H01L2924/181H01L2924/00014H01L24/73H01L24/48H01L2924/00012H01L2924/00H01L2224/13099H01L2224/13599H01L2224/05599H01L2224/05099H01L2224/29099H01L2224/29599
Inventor 周世文
Owner CHIPMOS TECH INC