Online diameter measuring method for microelectrode of orthogonal point electric contact standard rod

Abstract

The invention discloses an online diameter measuring method for a microelectrode of an orthogonal point electric contact standard rod, which belongs to the field of non-conventional micromachining. The axis of the standard rod is perpendicular to that of the microelectrode to be measured, so that the outer diameter of the microelectrode contacts with a circle point of the outer diameter of the standard rod when in electric contact measurement. The standard rod with a small diameter is used as an alignment reference, a movement direction is orthogonally aligned with the axial direction of the standard rod, the microelectrode electrically contacts with the standard rod twice, the relative positions of the microelectrode and the standard rod are set by a numerical control system, and the radial size of the microelectrode is calculated. The online diameter measuring method has the advantages that 1) online measuring precision of the radial size of the microelectrode is improved, and 2) alignment points do not need to be precisely positioned in two-time electric contact measurement, and operation and control are simple and convenient during measurement.

Description

technical field [0001] The invention belongs to the field of micro special processing, and in particular relates to a method for on-line measurement of the diameter of a micro-electrode that is electrically contacted with a standard rod at an orthogonal point. Background technique [0002] Micro-EDM requires the use of micro-tool electrodes for spark discharge erosion to remove workpieces. In order to avoid the secondary clamping error and the difficulty of installation operation, the micro-rod-shaped tool electrode used for processing micro-holes, micro-grooves, and micro-three-dimensional cavities, especially when the radial dimension is less than 100 μm, generally adopts an online production method. The on-line production technology of micro-electrode such as wire electric discharge grinding method (WEDG: Wire Electric Discharge Grinding) and reverse block method has been relatively mature, and the diameter of the micro-electrode produced on-line can even reach 3 μm to 5 ...

AI Technical Summary

Problems solved by technology

The trial cutting method uses micro-electrodes to perforate micro-holes on the sheet for trial processing, and calculates the micro-electrode size by measuring the size of the micro-holes off-line, which is affected by the discharge gap and electrode loss, resulting in poor measurement accuracy and low measurement efficiency.

The image method uses CCD to enlarge the online display for measurement, but the dielectric liquid, light intensity, and focus position affect the measurement accuracy, and the high-precision CCD is expensive, and special attention needs to be paid to the use environment and performance debugging

The standard block contact method uses the micro-electrode to contact the standard block electrically, and the relative position of the micro-electrode and the standard block is given by the numerical control system to calculate and measure the radial size of the micro-electrode; this measurement method has the advantages of simplicity and high efficiency, but currently the square The electrical contact method in which the block or thick rod is used as the standard block and the fine electrode is positioned parallel to the axial direction. The measurement will introduce the manufacturing error of the standard block and the relative position error between the fine electrode and the standard block, resulting in measurement accuracy, especially repeatability. Measurement accuracy is still relatively low. Low

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