Method and device for measuring space of pixels of image sensor by using linear light source

Abstract

The invention relates to a method and device for measuring the space of pixels of an image sensor by using the linear light source, belonging to the field of the measurement of length, width or thickness by adopting the optical method. The method comprises the following steps: obtaining a linear image by using the linear light source as a target, searching the value taking range of the space of the pixels in the frequency domain, and calculating the space of the pixels according to the characteristic that the actual modulation transfer function curve and the theoretical modulation transfer function curve which are relevant to the space of the pixels can coincide best under the least square condition. The device is characterized in that the linear light source is curved in a plane defined by the optical axis direction and the row or column direction of the image sensor and the point target can be imaged in any position on the linear light source by calibrating the focus. Due to the adoption of the method and the device for measuring the space of pixels of the image sensor, the errors between the single-time measurement results can be reduced, and the repeatability of the measurement results can be improved accordingly.

Description

technical field [0001] The method and device for measuring the pixel pitch of an image sensor using a line light source belong to the field of measuring length, width or thickness in the field of measuring equipment characterized by the use of optical methods, and in particular relate to a line light source as the target, using line in the frequency domain A measurement method and device for measuring the pixel pitch of an image sensor by using a light source image. Background technique [0002] Image sensor pixel pitch is a very important technical indicator in the field of precision measurement. For example, if a target with a known size is imaged through an optical system, the size of the target image can be known according to the number of pixels of the image sensor occupied by the target image and the pixel pitch, and finally the size of the target image can be compared with the target size to obtain The lateral magnification of the optical system can be calibrated; in...

AI Technical Summary

Problems solved by technology

[0041] The present invention aims at the problem that the above-mentioned existing measurement method is not suitable for measurement in a small field of view, and the problem that the existing measurement device has defocus, and proposes a method and device for measuring the pixel pitch of an image sensor in the frequency domain. Improves the repeatability of measurement results within the field; the device can eliminate the influence of defocus on measurement results

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