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Perforated Microsilicon Microphone

A silicon microphone, miniature technology, used in sensor parts, sensors, electrostatic transducer microphones, etc., can solve the problems of reducing the signal-to-noise ratio of the microphone, reducing the original sensitivity of the microphone, etc., to achieve high signal-to-noise ratio, wide and flat The effect of frequency response

Active Publication Date: 2015-08-05
JRMEMS TECH (WUXI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Parasitics act as a voltage divider, reducing the original sensitivity of the microphone, thus requiring electronic circuitry to further amplify the original signal and reduce the signal-to-noise ratio of the microphone

Method used

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  • Perforated Microsilicon Microphone
  • Perforated Microsilicon Microphone
  • Perforated Microsilicon Microphone

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Embodiment Construction

[0038] The present invention will be further described below in conjunction with specific drawings and embodiments.

[0039]For a silicon condenser microphone, its sensitivity is mainly related to the control of the internal stress of the diaphragm; when the size of the diaphragm is fixed, its mechanical sensitivity is inversely proportional to the internal stress in the diaphragm. A diaphragm is most mechanically sensitive when free to move like a piston in a plane perpendicular to its own plane. On the other hand, a certain degree of internal stress needs to be maintained in the diaphragm so that its resonant frequency is far away from the frequency range in which it operates, thus exhibiting a flat frequency response in the audio frequency range. In addition, the separator needs to be made harder from the viewpoint of mechanical strength. This seems to contradict the proposed requirement that silicon condenser microphones need to have a method of tightly controlling their ...

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Abstract

This invention relates to a miniature silicon capacitive microphone having a perforated backplate supported on a substrate, a shallowly corrugated and perforated diaphragm that is suspended above said backplate and said suspended shallowly corrugated and perforated diaphragm is fully clamped and anchored on the said substrate at the edge of said diaphragm. Said perforated backplate is isolated electrically from said substrate by a layer of dielectric material. Said suspended shallowly corrugated diaphragm has a plurality of perforation holes to allow the passage of slow varying ambient pressure, and to equalize the barometric pressure in and out of the back cavity.

Description

technical field [0001] The invention relates to a silicon microphone, in particular to a perforated miniature silicon microphone, which belongs to the technical field of silicon microphones. Background technique [0002] Related references: such as US patent documents 5,146,435; 5,452,268; 6,535,460; 6,847,090; 6,870,937; [0003] Silicon condenser microphones have been an attractive topic for many publications and disclosures. Batch processing of microfabrication enables inexpensive and high-volume production of these microphones. Compared with traditional condenser microphones, silicon condenser microphones provide a greater optimization parameter, and at the same time facilitate electronic integration of chips. [0004] In many publications, such as U.S. Patent Nos. 5,146,435, 5,452,268, 6,847,090, and 6,870,937, the movable diaphragm of a silicon condenser microphone is supported by a substrate or an insulator, such as silicon nitride, silicon oxide, and polyimide Ami...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R19/04
CPCH04R1/222H04R19/04
Inventor 王云龙
Owner JRMEMS TECH (WUXI) CO LTD
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