Large-journey measuring method of moving platform displacement
A technology of displacement measurement and measurement method, which is applied in the direction of measuring device, conversion sensor output, instrument, etc., can solve the problem of limited PSD measurement range of the motion table stroke, and achieve the effect of reducing the difficulty
Active Publication Date: 2012-09-12
TSINGHUA UNIV +1
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[0005] In order to overcome the problem that the travel of the moving table is limited by the PSD measurement range in the existing application, the present invention provides a PSD array measurement solution capable of measuring the displacement of the moving table with a large stroke
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[0030] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0031] A displacement measurement method for a large-stroke motion table, the measurement method mainly includes an optical path distribution device 201, a PSD301 linear array, and a detection head 401 array.
[0032] Such as figure 1 As shown, the optical path distribution device 201 is fixed on the moving table 101, and the optical path distribution device 20) generates multiple parallel first measurement lights 204, and the first measurement light 204 is parallel to the horizontal plane; multiple position sensitive The detectors 301 form a linear array and are fixed on the base 102. The working surface of the position sensitive detector 301 is perpendicular to the horizontal plane of the base 102; The linear array 301 is arranged in a certain way, so that at least one beam of first measuring light 204 of the moving table 101 is detected...
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A large-journey measuring method of moving platform displacement comprises a light path distribution device, a position sensitive detector array and a detector array. A plurality of beams of first measuring light generated by the light path distribution device and the position sensitive detector array are distributed according to a certain mode to ensure that at least one beam of first measuring light of a moving platform is detected by the position sensitive detector array at any position in the moving area. The detector array capable of judging whether the light beams are shaded or not or not can be used for auxiliary measurement of the moving platform position. By means of the measuring scheme, and the large-journey measuring method can determine the moving platform position that the first measuring light measured by the position sensitive detector array correspond to and further calculates the moving platform displacement. The large-journey measuring method effectively enlarges measuring range of position sensitive detectors and achieves measurement of large-journey displacement of the moving platform.
Description
technical field [0001] The invention relates to a measurement scheme, and in particular to a position-sensitive detector array large-stroke displacement measurement device. Background technique [0002] Position Sensitive Detector (PSD: Position Sensitive Detector) is a PIN type photodiode that is sensitive to the position of the incident light point on the photosensitive surface. It is composed of three layers of P, I, and N through a planar diffusion manufacturing process. Sensitive to incident light in both directions of the sensor plane. It is widely used in non-contact laser displacement detection systems due to its advantages of high resolution, strong practicability, fast response speed, and simple structure of subsequent processing circuits. [0003] In the motion control system where the measurement accuracy is required to be micron level, PSD and CCD have been widely used, both of which can obtain the six-degree-of-freedom displacement of the motion table through ...
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IPC IPC(8): G01B11/02
CPCG01D5/285G01B11/04G01B11/14
Inventor 张鸣朱煜刘昊蒋毅刘召杨开明胡金春徐登峰穆海华尹文生
Owner TSINGHUA UNIV