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Air floatation structure of separated type air foot

A split-type, air-floating technology, applied in the directions of bearings, shafts and bearings, mechanical equipment, etc., can solve the problems of gas foot gas vibration and affect the gas foot stability, etc. Effect of small pressure loss

Active Publication Date: 2012-09-19
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The positive pressure gas output from the air flotation hole 20e will diffuse to the periphery of the bottom surface of the air flotation structure, and a part of the positive pressure gas will diffuse to the bottom of the air foot plate 2000, which will easily cause the air foot to generate gas vibration during work. Affect the stability of air foot operation

Method used

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  • Air floatation structure of separated type air foot
  • Air floatation structure of separated type air foot
  • Air floatation structure of separated type air foot

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Embodiment Construction

[0027] The following will combine Figure 2 ~ Figure 6 The air flotation structure of the split air foot of the present invention is further described in detail.

[0028] see figure 2 and image 3 , a split air foot, placed on the platform ( figure 2 (not shown in ), the split type air foot includes an air foot plate 200, the four corners of the bottom of the air foot plate 200 are respectively provided with an air flotation structure 200a, 200b, 200c and 200d, and the air foot plate 20000 Equipped with a vacuum preload structure 1;

[0029] Optionally, the air flotation structures 200a, 200b, 200c, and 200d can be formed by processing the air foot plate 200, that is, the air flotation structures 2a, 2b, 2c, and 2d are formed with the air foot plate 200. One;

[0030] continue to see figure 2 , the vacuum preload structure 1 is connected to the air foot plate 200 in a split type, and the four connection points O between the vacuum preload structure 1 and the air foot ...

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Abstract

The invention relates to an air floatation structure of a separated type air foot. The air flotation structure is positioned at the bottom of an air foot plate, and air floatation holes and air flues are formed in the air floatation structure. The air floatation holes are communicated with the air flues and are communicated with the bottom face of the air floatation structure. Positive pressure gas delivered to the air floatation holes from the air flues is output from the bottom face of the air floatation structure. The bottom face of the air floatation structure is provided with a pressure release trough which half surrounds the air floatation holes outside and prevents the positive pressure gas output from the bottom face of the air flotation structure from diffusing below the bottom of the air foot. According to the air flotation structure of the separated type air foot, higher air flotation rigidity can be obtained under greater air film thickness, the bearing capacity of the air foot is improved, air vibration during the work of the air foot can be avoided, and the stability of the air foot operation is improved.

Description

technical field [0001] The invention relates to microelectronic equipment, in particular to an air-floating structure with split-type air feet. Background technique [0002] The air foot is the key component to provide air bearing support for the precision motion table to ensure the frictionless movement of the motion table on the platform (usually a marble platform), which includes an air flotation structure and a vacuum preload structure. [0003] figure 1 Shown is the air foot plate 2000 of the air foot in the prior art, the four corners of the bottom of the air foot plate 2000 are respectively provided with an air flotation structure 20a, 20b, 20c and 20d, and each of the air flotation structures is provided with Four air flotation holes 20e, the four air flotation holes 20e are all communicated with the bottom surface of the air flotation structure, and the four air flotation holes 2'e are respectively located at the four corners of the air flotation structure, the air...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C32/06
Inventor 李进春齐芊枫方洁郑椰琴夏海吴立伟
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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