Overload-proof pressure sensor, in particular differential pressure sensor
A pressure sensor, sensor technology, applied to the pressure difference measurement between multiple valves, the measurement of fluid pressure through electromagnetic components, the measurement of fluid pressure through mechanical components, etc.
Inactive Publication Date: 2012-09-19
EHNDRESS KHAUZER GMBKH KO KG
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[0063] figure 1The shown differential pressure sensor 1 comprises a measuring membrane 2 which divides the inner space of the sensor body into a first chamber part 3a and a second chamber part 3b. In the first chamber part 3a and in the second chamber part 3b, electrode supports 4a, 4b are arranged in each case, wherein, in order to provide a pressure-related measurement signal, on the one hand, the evaluation The capacitance between the electrode on the measuring membrane 2 and the first counter electrode on the first electrode support 4a, and on the other hand, evaluates the electrode on the measuring membrane 2 and the first electrode on the second electrode support 4b. The capacitance between two opposing electrodes. The measuring membrane 2 and the two electrode supports 4a, 4b are manufactured, for example, from steel and are electrically insulated relative to each other by a first annular insulator 6a and a second annular insulator 6b, wherein the insulators may in par...
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Abstract
The invention relates to a pressure sensor (1) comprising a sensor body having a sensor chamber in the interior, at least one first separating membrane (16a, 16b), which is connected to the sensor body forming a first separating membrane chamber (15a, 5b); a measuring membrane (2) which divides the sensor chamber into two sub-chambers (3a, 3b); a transfer fluid with which the first separating membrane chamber, the first sub-chamber and a channel therebetween are filled in order to transfer pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature and for a pressure range, wherein the transfer fluid volume in the first sub-chamber, the first channel and the first separating membrane chamber is sufficient at the minimum temperature to transfer pressure to the measuring membrane over the entire pressure range without the first separating membrane contacting, and when the entire oil volume enters the first sub-chamber from the first separating membrane chamber in case of overload at maximum temperature and is accommodated by the measuring membrane (2), the measuring membrane undergoes no plastic deformation (1).
Description
technical field [0001] The invention relates to overload-safe pressure sensors, in particular differential pressure sensors of this type. Pressure sensors and in particular differential pressure sensors are usually specified for a certain measuring range in which they deliver pressure-dependent measured values, wherein, ideally, they should withstand considerable overload without damaging the sensor. This is especially true for differential pressure sensors, since in this case the static pressure at which the difference is to be confirmed may always exceed, for example, a thousand times the measuring range of the difference to be confirmed, so that in the event of a failure, when the measuring membrane A thousand-fold overload can easily occur when only one side of the . The measuring membrane of the differential pressure sensor must therefore be protected from this situation. Background technique [0002] For this purpose, there is a concept for providing an overload mem...
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IPC IPC(8): G01L7/08G01L13/02G01L19/04G01L19/06
CPCG01L19/04G01L9/0044G01L13/025G01L19/06G01L7/082G01L19/0618
Inventor 英·图安·塔姆拉斐尔·泰伊朋迈克尔·菲利普斯
Owner EHNDRESS KHAUZER GMBKH KO KG