Micro-electro-mechanical system (MEMS)-based vibration energy acquisition device

Abstract

The invention discloses a micro-electro-mechanical system (MEMS)-based vibration energy acquisition device. The MEMS-based vibration energy acquisition device comprises an upper pyrolytic graphite thin plate, a suspended permanent magnet, a lower pyrolytic graphite thin plate and a lifting permanent magnet, wherein the upper pyrolytic graphite thin plate, the suspended permanent magnet and the lower pyrolytic graphite thin plate are arranged from top to bottom in sequence; an upper induction coil is arranged on the lower side surface of the upper pyrolytic graphite thin plate; and a lower induction coil is arranged on the upper side surface of the lower pyrolytic graphite thin plate. According to the MEMS-based vibration energy acquisition device provided by the invention, a permanent magnet serves as a suspension body; anti-magnetic material structures are respectively arranged above and below the permanent magnet; an induction coil is arranged on each anti-magnetic material; in order to realize the suspension of the permanent magnet well, the lifting permanent magnet is also arranged on the upper anti-magnetic material structure; in a static state, the permanent magnet is suspended between the two anti-magnetic material structures; and under the action of ambient vibration, the permanent magnet moves up and down without friction, so that induced electromotive force is generated in the upper and lower induction coils and is stored by a power storage loop.

Description

technical field [0001] The invention relates to an energy harvesting device, in particular to a device that uses an environmental vibration source to provide power for a wireless sensor or a biological micro-nano electromechanical autonomous system, in particular to a vibration energy harvester based on MEMS. Background technique [0002] Wireless sensors or bio-micro-nano-electromechanical autonomous systems are currently receiving more and more attention, such as real-time monitoring of device performance and the use of portable bio-micro-nano-electromechanical systems. However, the power supply of these devices cannot be solved well at present, which limits their wide application. Energy harvesting (Energy harvesting, Energy scavenging) refers to the use of light, heat, vibration, biotechnology and other technologies to collect unused energy in the environment (such as light energy, thermal energy, mechanical energy, wind energy, etc.) and convert it into usable electric...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a MEMS-based vibration energy harvester. The MEMS-based vibration energy harvester will solve the problem that mechanical vibration energy harvesters in the prior art need to support the vibrator through supporting components, thus causing additional energy consumption and the technical problem of low energy harvesting efficiency of the vibration energy harvester

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