Frequency detector based on micro-mechanical silicon-based cantilever beam and detection method

A frequency detector, frequency detection technology, applied in the direction of frequency measurement devices, etc.

Inactive Publication Date: 2012-10-17
SOUTHEAST UNIV
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  • Application Information

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Problems solved by technology

According to the specific implementation methods, the widely used frequency measurement methods can be divided into the following four types: heterodyne method, counting method, resonance method and phase comparison method. They have the advantages of high precision and wide frequency band, but their biggest disadvantages It requires more precise measuring instruments

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  • Frequency detector based on micro-mechanical silicon-based cantilever beam and detection method
  • Frequency detector based on micro-mechanical silicon-based cantilever beam and detection method
  • Frequency detector based on micro-mechanical silicon-based cantilever beam and detection method

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Embodiment Construction

[0027] The present invention will be further described below in conjunction with the accompanying drawings.

[0028] see Figure 1-3 , the frequency detector based on the micromechanical silicon cantilever beam provided by the present invention, the frequency detector includes

[0029] Power divider P, 90 degree phase shifter Y, low pass filter L and Si MOSFET,

[0030] Power divider, used to receive the microwave signal to be tested, and divide the microwave signal to be tested into two branch signals with the same amplitude and phase, namely the first microwave signal and the second microwave signal, and output them to the Si MOSFET respectively and 90 degree phase shifter;

[0031] The 90-degree phase shifter is used to receive the second microwave signal, delay the second microwave signal, generate a phase shift proportional to the frequency of the signal, and output the third microwave signal to the Si MOSFET structure ;

[0032] A low-pass filter is used to connect t...

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Abstract

The invention discloses a frequency detector based on a micro-mechanical silicon-based cantilever beam and a detection method. The frequency detector comprises a power divider (P), a 90-DEG phase shifter (Y), a low-pass filter (L) and a silicon-based metal-oxide-semiconductor field effect transistor, wherein the power divider is used for receiving a microwave signal to be detected and dividing the microwave signal to be detected into two branch signals with the same amplitude and phase. The detection method comprises the following steps of: when direct current offset is loaded to a pull-down electrode (81) and a cantilever beam (7) is pulled down and contacted with a gate (5), simultaneously loading two paths of microwave signals to the gate (5); and when the silicon-based metal-oxide-semiconductor field effect transistor is in a frequency detection state, outputting current components which comprise the frequency information of the signal to be detected from saturation current between a source (2) and a drain (3), and detecting the size of the saturation current, so frequency detection is realized. The invention has the advantages of simple structure and convenience for measurement.

Description

Technical field [0001] The invention proposes a frequency detector based on micro -mechanical silicon -based cantilever beams, which belongs to the technology field of Microelectronics Machinery System (MEMS). Background technique [0002] Microwave signal frequency detectors are widely used in the field of radar electronic detection systems and microwave communication.The principle of existing microwave frequency detectors is to compare the measured frequency directly or indirectly with the standard frequency.According to the specific implementation methods, the use of a wide range of frequency measurement methods can be divided into the following four types: the outer disclosure method, counting method, resonance method, and comparison method. They have the advantages of high precision and broadband bands. HoweverIt is necessary to be more precise measuring instruments.In recent years, with the rapid development of MEMS technology, and in-depth research on the MEMS cantilever s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R23/02
Inventor 廖小平华迪
Owner SOUTHEAST UNIV
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