Frequency detector based on micro-mechanical silicon-based cantilever beam and detection method

Abstract

The invention discloses a frequency detector based on a micro-mechanical silicon-based cantilever beam and a detection method. The frequency detector comprises a power divider (P), a 90-DEG phase shifter (Y), a low-pass filter (L) and a silicon-based metal-oxide-semiconductor field effect transistor, wherein the power divider is used for receiving a microwave signal to be detected and dividing the microwave signal to be detected into two branch signals with the same amplitude and phase. The detection method comprises the following steps of: when direct current offset is loaded to a pull-down electrode (81) and a cantilever beam (7) is pulled down and contacted with a gate (5), simultaneously loading two paths of microwave signals to the gate (5); and when the silicon-based metal-oxide-semiconductor field effect transistor is in a frequency detection state, outputting current components which comprise the frequency information of the signal to be detected from saturation current between a source (2) and a drain (3), and detecting the size of the saturation current, so frequency detection is realized. The invention has the advantages of simple structure and convenience for measurement.

Description

Technical field [0001] The invention proposes a frequency detector based on micro -mechanical silicon -based cantilever beams, which belongs to the technology field of Microelectronics Machinery System (MEMS). Background technique [0002] Microwave signal frequency detectors are widely used in the field of radar electronic detection systems and microwave communication.The principle of existing microwave frequency detectors is to compare the measured frequency directly or indirectly with the standard frequency.According to the specific implementation methods, the use of a wide range of frequency measurement methods can be divided into the following four types: the outer disclosure method, counting method, resonance method, and comparison method. They have the advantages of high precision and broadband bands. HoweverIt is necessary to be more precise measuring instruments.In recent years, with the rapid development of MEMS technology, and in-depth research on the MEMS cantilever s...

AI Technical Summary

Problems solved by technology

According to the specific implementation methods, the widely used frequency measurement methods can be divided into the following four types: heterodyne method, counting method, resonance method and phase comparison method. They have the advantages of high precision and wide frequency band, but their biggest disadvantages It requires more precise measuring instruments

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