Equipment and method for coating sensitive material on micro-heater

Abstract

The invention provides equipment and a method for coating a sensitive material on a micro-heater. The equipment comprises a loading device and a coating device; the loading device comprises a micro-nozzle for loading the sensitive material, a sleeve sleeved at a loading end of the micro-nozzle, and a pressure adjuster for generating a negative pressure in the micro-nozzle; the coating device comprises the micro-nozzle loaded with the sensitive material, a piezoelectric driver for driving the micro-nozzle, a connecting piece for clamping and fixing the micro-nozzle so that a feeding end and a discharge end of the micro-nozzle vertically aligns to the surface of the micro-heater, and a rack connected with the piezoelectric driver; and the rack is provided with a sliding groove where the piezoelectric driver and the micro-nozzle move along the vertical direction. The invention further provides the method for coating the sensitive material on the micro-heater. With the adoption of the equipment and the method for coating the sensitive material on the micro-heater provided by the invention, a coating amount of the sensitive material can be controlled, and a coating position of the sensitive material is adjusted in real time, so that the problem that the sensitive material cannot be quantitatively and uniformly coated on the surface of the micro-heater in prior art can be solved.

Description

technical field [0001] The invention relates to the technical field of micro-heater preparation, in particular to a device and a method for coating sensitive materials on a micro-heater. Background technique [0002] The gas sensor used to detect combustible gases is mainly a carrier catalytic element, which is usually coated with platinum or its alloys on alumina or other porous ceramics (called carrier) loaded with platinum palladium or other noble metal catalysts. It is formed on the made heating wire (micro heater). When in use, the heating wire is heated to a certain temperature so that the combustible gas to be measured is burned on the catalytic surface of the carrier. The temperature change caused by the combustion and heat release will change the resistance of the heating wire , the concentration of combustible gas can be determined by measuring the change of this resistance through Wheatstone bridge. [0003] Among them, the shape of the traditional micro-heater i...

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a device and method for coating sensitive materials on a micro heater, which is used to solve the problem that the sensitive materials cannot be quantitatively and uniformly coated on the micro heater. Problems with Micro Heater Surfaces

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