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Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology

A roller and stamper technology, which is applied in the field of making roller stampers based on dynamic nano-scribing technology, can solve the problem of high cost, achieve the effects of low cost, lower cost and solve difficult preparation

Inactive Publication Date: 2014-06-18
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the prerequisite for the implementation of this method is the need for a large-area nanostructure planar stamper with extremely high cost.

Method used

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  • Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology
  • Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology
  • Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology

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Embodiment Construction

[0033] The embodiment of the present invention discloses a method for making a roller stamper based on dynamic nano-scribing technology. The planar stamper with a nanostructure is brought into contact with the surface of the roller to be processed, and the edge of the fractured surface of the planar stamper is used to draw the surface of the roller to be processed. Nanoscale wire grids are carved on the surface.

[0034] The embodiment of the present invention also discloses a method for making a flat die, comprising the following steps:

[0035] 1. Embossing the first roller through the first flat plate with the nanostructure, forming a structure complementary to the nanostructure on the surface of the first flat plate on the surface of the first roller;

[0036] 1. Embossing the second flat plate by the first roller, forming a structure complementary to the nanostructure on the surface of the first roller on the surface of the second flat plate, and obtaining a planar st...

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Abstract

The invention discloses a method for manufacturing a rotary drum pressing die based on a dynamic nano engraving technology. A plane pressing die with a nano structure is in contact with the surface of a rotary drum to be processed; and a wire grid of a nano scale is engraved on the surface of the rotary drum to be processed by using the edge of a broken surface of the plane pressing die. The invention also discloses a method for manufacturing the plane pressing die. According to the method, the width of a produced line can meet a nano level; due to the pressing die for the rotary drum, the production cost is reduced, and the obvious advantage of continuous production can be realized; and a small-area nano-level template is enlarged to be a large-area nano-level template, so that the problem that a large-area nano-level die is difficult to prepare is solved.

Description

technical field [0001] The invention belongs to the field of manufacturing methods of micro-optical elements, and in particular relates to a method for manufacturing a roller die based on a dynamic nanometer scribing technology. Background technique [0002] Roll to roll (roll to roll) continuous nanoimprinting technology can break through the bottleneck of long cycle and small area of ​​existing lithographic imprinting technology. Direction of development. [0003] The principle of roll-to-roll continuous nanoimprinting manufacturing technology is to produce large-area functional components with nanostructures in a continuous rolling replication method on a flexible substrate by rolling a roll with a nanostructure. However, since the production of the roller die involves nano-processing of the curved surface. Therefore, the production of roller stamper has become the technical bottleneck and research hotspot of roll-to-roll nanoimprinting technology. [0004] There are m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00B82Y40/00
Inventor 高育龙崔铮
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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