Method for manufacturing damascene structure
A technology of manufacturing method and process method, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as lithography rework difficulties, achieve stable process, easy control of process, and improve production efficiency
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[0039] Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the description in the following paragraphs. It should be understood that the invention is capable of various changes in different examples without departing from the scope of the invention, and that the descriptions and illustrations therein are illustrative in nature rather than limiting the invention.
[0040] The above and other technical features and beneficial effects will be combined with the embodiments and the accompanying Figure 2-12 A method for fabricating a Damascus structure of the present invention will be described in detail.
[0041] figure 2 It is a schematic flow chart of a preferred embodiment of a method for fabricating a Damascene structure of the present invention. In this embodiment, a method for fabricating a damascene structure includes steps S01 to S10, and steps S01 to S10 are respectively carried out by attaching Figur...
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