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Flexible fixing device for optical element

A technology of optical components and fixing devices, which is applied in the direction of optical components, optics, installation, etc., can solve the problems of brittle materials, mechanical installation of quartz rods, difficult fixing, large thermal deformation, etc., and achieve accurate and stable positioning

Active Publication Date: 2013-02-13
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the quartz rod is in the shape of a bar (the aspect ratio is usually much greater than 10:1), the material is brittle and the thermal deformation is large, which brings difficulties to the mechanical installation and fixing of the quartz rod

Method used

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  • Flexible fixing device for optical element
  • Flexible fixing device for optical element
  • Flexible fixing device for optical element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] figure 1 Shown is an exploded view of the flexible fixture of the optical element of this embodiment, figure 2 Shown is the sectional view of the flexible fixing device of the optical element of this embodiment, image 3 shown as figure 2 A-A view of;

[0032] The flexible fixing device of the optical element of this embodiment is used for mechanically installing and fixing the optical element in the shape of a bar, and the axis direction of the optical element in the shape of the bar (that is, along the length direction of the optical element) is used as the Z-axis direction to establish a three-dimensional coordinate system, such as figure 2 As shown, point the right thumb to the positive direction of the Z axis, and make a fist with the other four fingers. The direction of the other four fingers making a fist is defined as the Rz direction, and the Rx and Ry directions are defined similarly;

[0033] see figure 1 , the flexible fixing device of the optical ele...

Embodiment 2

[0053] see Figure 7 The difference between the second embodiment and the first embodiment is that a thin gasket 207 is provided between the outer wall of the optical element 204 and the elastic plunger 205, and the thin gasket 207 can be made of elastic material. The thin gasket 207 is used to reduce the stress of the elastic plunger 205 on the outer wall of the optical element 204, so that the flexible fixing device of the optical element in this embodiment can meet the requirements of a certain vibration environment;

[0054] For optical elements such as quartz rods whose material is relatively brittle, the thin gasket 207 can protect the optical elements, preventing the elastic plunger 205 from exerting too much force and crushing the optical elements.

[0055] The structure of the tray 303 in the second embodiment is slightly different from the structure of the tray 302 in the first embodiment. In the second embodiment, the tray 303 is not provided with a diaphragm, but t...

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Abstract

The invention discloses a flexible fixing device for an optical element. The flexible fixing device comprises a pressure plate, a spring, a gland, a 3 / 4 cylinder, a 1 / 4 cylinder, elastic plungers, a support seat and a pallet. The optical element is clamped in an integral cylinder formed by the 3 / 4 cylinder and the 1 / 4 cylinder. The 3 / 4 cylinder and the 1 / 4 cylinder are arranged in the support seat. The two ends of the 3 / 4 cylinder and the 1 / 4 cylinder are positioned in the support seat. One end of each elastic plunger penetrates through the support seat and the 1 / 4 cylinder, and is pressed against the outer sidewall of the optical element. The pallet is arranged at one end of the support seat. One end of the optical element is positioned on the pallet. The gland is arranged at the other end of the optical element. The spring is sleeved on the gland. The spring is tightly pressed by the pressure plate which is connected with the other end of the support seat.

Description

technical field [0001] The invention relates to microelectronic equipment, in particular to a flexible fixing device for optical elements. Background technique [0002] Quartz rods are often used as light homogenizers in optical systems. For example, quartz rods are used in the exposure system of photolithography machines to achieve light uniformity. Because the quartz rod is in the shape of a bar (the aspect ratio is usually much greater than 10:1), the material is brittle and the thermal deformation is large, which brings difficulties to the mechanical installation and fixing of the quartz rod. Contents of the invention [0003] The purpose of the present invention is to provide a flexible fixing device for optical elements, which realizes the mechanical installation and fixing of strip-shaped optical elements by means of end face positioning and flexible fixing. [0004] In order to achieve the above-mentioned purpose, the present invention provides a flexible fixing d...

Claims

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Application Information

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IPC IPC(8): G02B7/00
Inventor 苏海业
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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