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fluid control valve

A fluid control valve, fluid technology, applied in the direction of valve lift, valve details, valve device, etc., can solve problems such as damage, valve body or surrounding parts wear, valve opening error, etc., to achieve the effect of preventing noise

Active Publication Date: 2016-12-28
HORIBA STEC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, since there is a gap between the valve body and the surrounding surface, due to the influence of the pressure received from the fluid, etc., the following problems may occur: the valve body is tilted with respect to the opening and closing direction of the valve body during the switching operation, or the valve body vibrates. As a result, an error occurs in the valve opening adjusted by the driving part
In addition, there are problems in that the valve body comes into contact with surrounding parts due to the vibration of the valve body to generate vibration noise, and in addition, the valve body or surrounding parts are worn or damaged due to the contact with the surrounding parts.

Method used

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no. 1 approach

[0036] An embodiment of a mass flow controller 100 equipped with a fluid control valve of the present invention will be described below with reference to the drawings.

[0037] Such as figure 1 As shown, the mass flow controller 100 of this embodiment is used in a semiconductor manufacturing device, and the mass flow controller 100 includes: a main body 5, on which a flow path 51 is formed, and in this flow path 51 flows a material used for, for example, a semiconductor as a measurement object. Fluids such as gas to be processed; flow detection mechanism 2, which detects the flow rate of fluid flowing through the flow path 51 of the main body 5; fluid control valve 3, which controls the flow rate of fluid flowing through the flow path 51; and the control part (not As shown in the figure), the valve opening of the fluid control valve 3 is controlled so that the measured flow output by the flow detection mechanism 2 is close to the predetermined set flow. Each part is described...

no. 2 approach

[0060] The fluid control valve 3 of the second embodiment is a normally open valve, and the difference from the first embodiment is that the arrangement of the valve seat part 4 and the valve body part 6 is reversed. In addition, the same code|symbol is attached|subjected to the component corresponding to the said 1st Embodiment.

[0061] Such as Figure 5 As shown, a valve body part 6 moved by the drive part 7 is provided on one side of the drive part 7, and a valve seat part 4 is provided on the opposite side of the valve body part 6 from the drive part 7, that is, on the main body 5 side. . In addition, the valve seat member 4 and the valve body member 6 are fitted into a recess 52 provided in the main body 5 . This recessed part 52 is arranged so that the flow path 51 of the main body 5 may be cut off like the said 1st Embodiment.

[0062] In the normal state where no voltage is applied to the driving part 7, the valve body part 6 is under the force of the surrounding e...

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Abstract

The present invention provides a fluid control valve capable of preventing contamination of fluid passing through the fluid control valve and capable of preventing a valve body from tilting or vibrating with respect to a moving direction. The fluid control valve includes: a valve body (6), arranged in the valve chamber (52) at a predetermined distance from the inner surface of the valve chamber (52), capable of connecting The seat (4) contacts or separates; the driving part (7) exerts a force on the valve body (6) toward the valve opening direction; the valve body return spring (8) exerts an effect on the valve body (6) toward the valve closing direction force; and an inclination restraining spring (9), which applies a force to the valve body (6) in the direction of eliminating the inclination of the valve body (6) relative to the switch direction.

Description

technical field [0001] The present invention relates to fluid control valves for use in, for example, mass flow controllers and the like to control gas flow. Background technique [0002] The so-called fluid control valve is installed between the upstream flow path and the downstream flow path to control the flow rate of the fluid flowing in the flow path, or to open or close it. For example, as a fluid control valve for controlling the flow rate of a gas used in semiconductor processing, a fluid control valve having a structure shown in Patent Document 1 is known. [0003] For example, as shown in FIG. 7 of Patent Document 1, a normally closed fluid control valve includes: a valve body disposed in a valve chamber formed on a main body and configured to be able to contact or separate from a valve seat disposed in the valve chamber. a driving component, which applies a force to the valve body in the direction of opening the valve; and a valve body return spring, which applie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K1/00F16K31/44
CPCF16K1/44F16K31/007F16K47/00F16K1/34F16K1/52F16K1/54F16K1/50
Inventor 林繁之
Owner HORIBA STEC CO LTD