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Device for interferometric distance measurement between two parallel plates

A technology of interferometric measurement and distance, applied in measurement devices, optical devices, instruments, etc., can solve problems such as limiting measurement accuracy, and achieve the effect of improving signal quality and measurement accuracy

Active Publication Date: 2013-03-13
DR JOHANNES HEIDENHAIN GMBH
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  • Abstract
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  • Application Information

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Problems solved by technology

Furthermore, in Fizeau interferometers the measurement accuracy is strongly limited due to the unavoidable multiple interferences

Method used

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  • Device for interferometric distance measurement between two parallel plates
  • Device for interferometric distance measurement between two parallel plates
  • Device for interferometric distance measurement between two parallel plates

Examples

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Embodiment Construction

[0045] now according to Figure 1a , 1b and 2 illustrate a first embodiment of the device according to the invention. Figure 1a , 1b schematically shows the beam path of this embodiment or shows parts of the beam path from different viewing angles, figure 2 A top view of the front of the scanning board of the device is shown.

[0046] The interferometric determination of the distance zP between two plates 1 , 2 arranged as parallel as possible can be carried out with high precision by means of the device according to the invention. For example, the two plates 1 , 2 are two flat plates made of glass, which are arranged, for example, in an optical position-measuring device and are movable relative to each other in one or two directions in a transverse xy plane. A system consisting of an optical position-measuring device and a device according to the invention for interferometric distance determination is arranged in a machine and is used to generate high-precision position i...

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Abstract

A device for interferometrically determining the distance between two plates disposed substantially in parallel, includes a light source, beam-splitter element(s), reflector element(s), deflection elements, retroreflectors, and a detection unit. A beam of rays emitted by the light source falls on the first plate and splits into a reflected reference beam of rays and a transmitted measuring beam of rays. The measuring beam strikes a reflector on the second plate and undergoes a first reflection back toward the first plate. The reference beam traverses a first deflection element, and the measuring beam traverses a second deflection element. Both beams pass through a retroreflector. The reference beam is reflected at the first plate, and the measuring beam undergoes a second reflection at a reflector of the second plate, so that both beams propagate collinearly interferingly toward the detection unit, where a plurality of phase-shifted distance signals are generated.

Description

technical field [0001] The invention relates to a device for determining distances for interferometric measurements between two plates arranged as parallel as possible. Background technique [0002] In addition to detecting a change in position of two objects that are movable relative to one another in the transverse direction, there are also measuring tasks in which it is only or optionally additionally necessary to determine the position of these objects in a vertical direction perpendicular thereto. distance. For example, this can involve determining the distance between two plates arranged as parallel as possible, wherein the plates have only a small distance relative to each other. Interferometric methods are suitable for such high-precision distance measurements, as disclosed in DE 10 2007 016 774 A1 or US Pat. No. 4,606,638. [0003] The device for interferometric distance determination known from DE 10 2007 016 774 A1 comprises a beam receiving unit arranged on a g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/14G01B9/02
CPCG01B9/02022G01B9/02G01B9/02056G01B9/02018G01B11/14G01B9/02061
Inventor 沃尔夫冈·霍尔扎普费尔
Owner DR JOHANNES HEIDENHAIN GMBH
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