Laser output adjustment device and method

Abstract

PURPOSE: A laser output adjustment apparatus and a method thereof are provided to easily adjust an output of a laser beam irradiated in a substrate. CONSTITUTION: A laser unit(100) generates a laser beam(10). An optical unit(200) provides a path of the laser beam. A processing unit(300) irradiates the laser beam passing the optical unit in a substrate(20). A first measurement unit(400) is arranged between the laser unit and the optical unit and measures an output of the laser beam generated from the laser unit. A second measurement unit(500) is arranged within the optical unit and measures the output of the laser beam passing the optical unit. A controlling unit(600) receives an output signal of the laser beam measured in the first measurement unit and the second measurement unit, transmits the signal to the laser unit, and adjusts the output of the laser beam generated from the laser unit. [Reference numerals] (100) Laser unit; (200) Optical unit; (400) First measurement unit; (500) Second measurement unit; (600) Controlling unit;

Description

technical field [0001] The invention relates to a laser output adjustment device and method. More specifically, it is a laser output adjustment device and method capable of easily adjusting the output energy of the laser beam irradiated on a substrate by measuring the laser beam generated in the laser unit by the first measurement unit and the second measurement unit. Background technique [0002] In recent years, with the increase in demand and the trend of large-scale flat panel display devices, especially in liquid crystal displays (LCD), the application degree, size increase and resolution increase speed are also accelerating, and in order to improve production efficiency and Achieving low prices has put a lot of effort into simplifying the manufacturing process and increasing yield. The basic structure of a liquid crystal display consists of an upper substrate formed with a black matrix, a color filter film, and a common electrode, and a lower substrate formed with pix...

AI Technical Summary

Problems solved by technology

But when the phenomenon that the output energy of the laser beam 10 decreases occurs, it is difficult to judge the position that causes the output energy of the laser beam 10 to decrease.

In addition, there is also the difficulty of readjusting the reduced output energy of the laser beam to the desired intensity

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