Double-axis flexible binding structure for micro-angle displacement platform

Abstract

A double-axis flexible binding structure for a micro-angle displacement platform comprises flexible axial binding hinges fixedly connected with the lower end of the micro-angle displacement platform. The other ends of the axial binding hinges are fixed at the bottom of a fixed casing, the structure further comprises a first flexible transverse binding hinge, a second flexible transverse binding hinge, a third flexible transverse binding hinge and a fourth flexible transverse binding hinge which have the same size and shape, one end of the first flexible transverse binding hinge, one end of the second flexible transverse binding hinge, one end of the third flexible transverse binding hinge and one end of the fourth flexible transverse binding hinge are respectively fixed at one ends of the micro-angle displacement platform, and the other ends of the four flexible transverse binding hinges are fixed on the inner walls of the fixed casing. Axial rigidity of the flexible transverse binding hinges is relatively large and is used for binding axial movement of the micro-angle displacement platform, and the four flexible transverse binding hinges have large transverse rigidity which is used for binding transverse movement of the micro-angle displacement platform. The double-axis flexible binding structure for the micro-angle displacement platform is reliable in binding, provides basis for high speed adjustment of a sub-micro radian rotating angle, and simultaneously has the advantages of being small in size and light in weight.

Description

technical field [0001] The invention relates to a restraint structure of a micro-angle pendulum platform, in particular to a flexible restraint structure of a two-axis micro-angle pendulum platform. Background technique [0002] At present, the micro-angular pendulum platform has increasingly important and extensive applications in the fields of microelectronics technology, bioengineering, and aerospace engineering. It is characterized by a small angle adjustment range and extremely high corner resolution, and often requires small size, light weight, and high response speed. The traditional restraint method is to adopt the universal joint bracket. Although the universal joint bracket can be adjusted in a large angle range, the adjustment accuracy is low, the frequency band is narrow, and the response is slow. The restraint method based on flexible hinges has the inherent characteristics of zero friction and zero gap, and can achieve sub-microradian angular resolution. [0...

AI Technical Summary

Problems solved by technology

[0003] In practical applications, it is often required that the micro-angular pendulum platform has a high response speed when it deflects quickly, but the response speed is limited by its control and the resonance frequency of the flexible restraint structure itself.

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