Double-axis flexible binding structure for micro-angle displacement platform

Abstract

A double-axis flexible binding structure for a micro-angle displacement platform comprises flexible axial binding hinges fixedly connected with the lower end of the micro-angle displacement platform. The other ends of the axial binding hinges are fixed at the bottom of a fixed casing, the structure further comprises a first flexible transverse binding hinge, a second flexible transverse binding hinge, a third flexible transverse binding hinge and a fourth flexible transverse binding hinge which have the same size and shape, one end of the first flexible transverse binding hinge, one end of the second flexible transverse binding hinge, one end of the third flexible transverse binding hinge and one end of the fourth flexible transverse binding hinge are respectively fixed at one ends of the micro-angle displacement platform, and the other ends of the four flexible transverse binding hinges are fixed on the inner walls of the fixed casing. Axial rigidity of the flexible transverse binding hinges is relatively large and is used for binding axial movement of the micro-angle displacement platform, and the four flexible transverse binding hinges have large transverse rigidity which is used for binding transverse movement of the micro-angle displacement platform. The double-axis flexible binding structure for the micro-angle displacement platform is reliable in binding, provides basis for high speed adjustment of a sub-micro radian rotating angle, and simultaneously has the advantages of being small in size and light in weight.

Description

technical field [0001] The invention relates to a restraint structure of a micro-angle pendulum platform, in particular to a flexible restraint structure of a biaxial micro-angle pendulum platform. Background technique [0002] At present, the micro-angle pendulum platform has an increasingly important and extensive application in the fields of microelectronics technology, biological engineering, aerospace engineering and so on. It is characterized by a small angle adjustment range and extremely high corner resolution, and often requires small size, light weight and high response speed. The traditional restraint method is to use a universal joint bracket. Although the universal joint bracket can be adjusted in a wide angle range, the adjustment accuracy is low, the frequency band is narrow, and the response is slow. The constraint method based on flexible hinges has the inherent characteristics of zero friction and zero clearance, and can achieve sub-micro-radian angle reso...

AI Technical Summary

Problems solved by technology

[0003] In practical applications, it is often required that the micro-angular pendulum platform has a high response speed when it deflects quickly, but the response speed is limited by its control and the resonance frequency of the flexible restraint structure itself.

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