Infrared microscope system and method for achieving image fusion thereof

Abstract

The invention discloses an infrared microscope system and a method for achieving image fusion thereof. The method comprises the following steps: first, a visible image is rotated, then, corresponding rotation is conducted on an infrared image, afterwards, stretching transformation is conducted on the rotated infrared image, wherein in the process of the stretching transformation, a feature point on the visible image is used as a reference coordinate, the specific value of the coordinate of a reference point on the infrared image and the coordinate of the feature point corresponding to the coordinate of the reference point is used as a ratio to conduct stretching transformation respectively so as to obtain the transformed infrared image, then, the transformed infrared image and the visible image are overlapped, finally, the overlapped transformed infrared image and the visible image are rotated in the direction opposite to the direction of the infrared image so as to be restored to the original state of the infrared image, and so that an overlying fusion image of the infrared image and the visible image can be obtained. The infrared microscope system and the method for achieving the image fusion thereof can meet the demands of clear imaging and detail analyzing of micro devices and microstructures at the same time, and can also achieve imaging of infrared thermal distribution.

Description

technical field [0001] The invention relates to an infrared microscope system and a method for realizing image fusion thereof. Background technique [0002] Infrared imaging has a wide range of applications in microcosmic fields such as the design of semiconductor power devices, the reliability detection of integrated circuits, the actual effect analysis of laser diodes, the thermal distribution analysis of MEMS devices, the analysis of thermal properties of materials, and the temperature analysis of biological specimens. The microscope system came into being. However, since infrared thermal imaging cameras are usually only sensitive to a single wavelength or a specific band, such as 7-14 μm band, 3-5 μm band, etc., it is not sensitive to the brightness change of the scene, and the imaging resolution is low, and the details of the image are captured Far less abundant than visible light. The visible light imaging microscope is sensitive to the reflection of the target objec...

AI Technical Summary

Problems solved by technology

However, since infrared thermal imaging cameras are usually only sensitive to a single wavelength or a specific band, such as 7-14 μm band, 3-5 μm band, etc., it is not sensitive to the brightness change of the scene, and the imaging resolution is low, and the details of the image are captured far less abundant than visible light

The visible light imaging microscope is sensitive to the reflection of the target object and has nothing to do with the thermal contrast. It can obtain high-definition images and provide detailed information of the target object, but it cannot provide the thermal spectrum information of the target object. Therefore, in many applications that require thermal spectrum Analytical detection applications are limited

Images