CIS wafer integration testing machine
A technology of wafer and height adjustment mechanism, applied in testing optical performance, single semiconductor device testing, etc., can solve the problems of inconvenient operation, can not meet the needs of CIS chip wafer-level testing, etc., to achieve convenient operation, compact structure, replacement Convenient and fast effect
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[0027] The specific implementation of the CIS wafer forming and testing machine of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0028] See attached figure 1 , 2 , 3. The CIS wafer tester includes a base 1 and a light source device 2, the light source device 2 is set on the base 1 through two sets of sliding platforms 3 and 4 whose displacement directions are perpendicular to each other. The light source device 2 comprises a lens mounting plate 5, the lens mounting plate 5 is arranged on the top of the light source device, and a plurality of lens mounting holes 6 are arranged on the lens mounting plate 5, and the lens mounting holes 6 are arranged in a dot matrix, and the distance between them is the same as that to be measured. The distance between the chips on the CIS wafer is corresponding or multiplied. A lens is arranged in each mirror delivery mounting hole 6 . A light source mounting plate 7 is arranged below...
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