Micro-electro-mechanical-system (MEMS) microphone and manufacturing method thereof

Abstract

The invention provides a micro-electro-mechanical-system (MEMS) microphone and a manufacturing method. The MEMS microphone comprises a substrate, back polar plates, a vibrating diaphragm, insulating layers, support layers and electrodes. The back polar plates comprise a first back polar plate and a second back polar plate; the insulating layers comprise a first insulating layer, a second insulating layer and a third insulating layer; and the support layers comprise a first support layer and a second support layer. The first insulating layer is arranged between the substrate and the first back polar plate, and the second insulating layer is arranged above the first back polar plate. The first support layer is arranged between the second insulating layer and the vibrating diaphragm, the second support layer is arranged between the vibrating diaphragm and the third insulating layer, the vibrating diaphragm is provided with vibrating diaphragm protruding pieces extending to the direction of the second insulating layer, and the third insulating layer is provided with insulating layer protruding pieces extending to the direction of the vibrating diaphragm; the second back polar plate is arranged above the third insulating layer; and the electrodes are respectively arranged on the first back polar plate and the second back polar plate. According to the MEMS microphone and the manufacturing method provided by the invention, the problems that the total harmonic distortion value is bigger and the vibrating diaphragm and the back polar plates are adhered and short-circuited can be solved.

Description

technical field [0001] The present invention relates to the technical field of MEMS microphones, and more specifically, to a MEMS microphone and a manufacturing method thereof. Background technique [0002] With the progress of society and the development of technology, in recent years, the volume of electronic products such as mobile phones and notebook computers has been continuously reduced, and people's requirements for the performance of these portable electronic products are also getting higher and higher. The size continues to decrease, and the performance and consistency continue to increase. MEMS (Micro-Electro-Mechanical-System, MEMS for short) process-integrated MEMS microphones have begun to be applied in batches to electronic products such as mobile phones and notebook computers. favored by merchants. [0003] At present, the structure of the microphone is mostly a combination of a single diaphragm and a single back plate. There are two types of back plate str...

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Problems solved by technology

[0006] In view of the above problems, the object of the present invention is to provide a MEMS microphone and manufacturing method thereof, to solve the problems of total harmonic distortion value, vibrating membrane and back plate sticking and short circuit

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