mems microphone and its manufacturing method
A production method and microphone technology, applied in the direction of sensors, electrostatic transducers, microphones, electrical components, etc., can solve problems such as short circuit, vibrating film and back plate sticking, total harmonic distortion value, etc., to reduce linear distortion, The effect of avoiding short circuit and reducing the total harmonic distortion value
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[0031] In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that these embodiments may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments. Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0032] figure 1 It is a structural schematic diagram of a MEMS microphone according to an embodiment of the present invention. Such as figure 1 Shown, the present invention provides a kind of MEMS microphone, comprises substrate 1, back pole plate, diaphragm, insulation layer, support layer and electrode; Back pole plate comprises first back pole plate 3 and second back pole plate 9; Insulation layer It includes a first insulating...
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