Large-scale surface throttling self-compensating ultra-precise liquid change table

Abstract

The invention discloses a large-scale surface throttling self-compensating ultra-precise hydrostatic pressure rotary table. The large-scale surface throttling self-compensating ultra-precise hydrostatic pressure rotary table comprises a stator system, a rotor system and a pressure fluid supply and distribution system. The pressure fluid supply and distribution system comprises a top axial hydrostatic bearing, a top radial hydrostatic bearing, a bottom axial hydrostatic bearing and a bottom radial hydrostatic bearing, and supplies pressure oil film support between the stator system and the rotor system. According to the large-scale surface throttling self-compensating ultra-precise hydrostatic pressure rotary table, geometry design is adopted in the stator system and the rotor system, the throttling surface gaps and the oil seal surface gaps of the hydrostatic bearings are formed, and pressure self-compensation of bearing oil cavities is achieved through throttling flow resistance. The change of the throttling surface gaps and the oil seal surface gaps is opposite to the change rule caused by rotor deflection, so that the fluid pressure change generated in the bearing oil cavities is two times that of a fixed throttling type hydrostatic bearing, and axial rigidity, radial rigidity and deflection rigidity of the ultra-precise liquid hydrostatic pressure rotary table are improved remarkably.

Description

technical field [0001] The invention relates to an ultra-precision processing device, in particular to a large surface throttling self-compensating ultra-precision hydrostatic turntable. Background technique [0002] The large-scale ultra-precision turntable is the key functional part of the large-diameter optical mirror ultra-precision grinding machine, which can be applied to the processing of space optical large-diameter mirrors with a diameter of 2 meters and above. In order to meet the requirements of large load, high rigidity and high rotation accuracy, the ultra-precision turntable basically adopts the hydrostatic bearing support method. In order to improve the static and dynamic stiffness of the turntable, the hydrostatic bearing needs to adjust the fluid pressure in the oil chamber by changing the flow of fluid flowing into the oil chamber to adapt to the change of the external load. Hydrostatic bearing restrictors usually use external small holes or capillary tube...

AI Technical Summary

Problems solved by technology

[0004] However, most of the current research is limited to small light-loaded hydrostatic turntable objects, and it is difficult to design and develop ultra-precision hydrostatic turntables for large-caliber optical mirror ultra-precision grinding machines, thereby limiting and reducing the size of large-scale space optical mirrors. manufacturing precision and efficiency

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