Low-steam-content gas humidity precise control device
A humidity control and precise control technology, applied in humidity control, non-electric variable control, control/regulation system, etc., can solve the problem of not controlling gases of different humidity, etc., to improve adaptability, ensure temperature, and improve control range. Effect
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[0028] specific implementation plan
[0029] figure 1 The inventive device shown includes: a stainless steel pipe (3), a control module, a humidity pre-stabilization module and a humidity control module;
[0030] The control module consists of a flow meter (1) and an automatic humidity control instrument (12); the humidity pre-stabilization module consists of a pre-humidity chamber (8), a sponge filling (10), a partition (9), and a water injection port (2) Composition: The humidity control module is composed of a primary humidity control room (6), a secondary humidity control room (4), and a water outlet (11).
[0031] Open the water injection port (2) before use, and inject deionized water into the pre-wet chamber (8) until the sponge filling (10) is wet. Turn on the power of the device, adjust the flow meter (1) to the required flow rate, and set the required gas humidity value. The pre-humidity chamber (8) reaches the degree of temperature adjustment in a relatively shor...
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