Optical Heterodyne Interferometry Based on Capacitance Timing and Multi-stage Filtering to Eliminate Nonlinear Errors
A technology of nonlinear error and optical heterodyne interference, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of complex system, large amount of calculation, poor real-time performance, etc.
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[0055] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0056] The system that implements the phase detection based on the capacitor charging timing method, multi-stage resonance filtering and optical heterodyne interferometry for eliminating nonlinear errors by weighted superposition in 3-dimensional linear space of the present invention can be divided into an optical part and an electronic signal processing part. The principle of the optical part is as follows figure 1 As shown, on the basis of an original optical part, the present invention adds the part in the dotted line box in the figure. First, the working principle of the optical part of the original heterodyne interferometry system is described: the laser light is emitted by the laser 101, and enters the acousto-optic device 103 through the first part of the mirror 102, and is frequency-shifted and then emitted to the second part of the mirror 114, and th...
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