Anti-sagging device for magnetron sputtering door
An anti-sag and magnetron sputtering technology, which is applied in the direction of sputtering plating, ion implantation plating, metal material coating technology, etc., can solve the problems of lack of sealing and achieve sagging prevention, convenient use, and simple structure Effect
Active Publication Date: 2015-01-21
BENGBU RENO VACUUM TECH
View PDF4 Cites 3 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
In the traditional magnetron sputtering deposition line, since the material of the magnetron sputtering gate is metal, the magnetron sputtering gate will sag due to the weight of the gate for a long time, so the sealing effect cannot be achieved.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0013] The present invention will be further described below in conjunction with the drawings and through the best implementation:
[0014] Magnetron sputtering door anti-sag device, such as figure 1 with figure 2 As shown, the anti-sagging device is a support block 1. The support block 1 has a stepped hole inside, wherein the diameter of the right hole 13 is larger than the diameter of the left hole 12, and the upper end surface of the support block 1 has a slope 11 on the right side. , The inclined surface 11 is inclined to the lower right corner, the inclination angle is 10 degrees, and the upper left end of the support block 1 has a convex step 14.
[0015] When in use, the device is fixed on the wall b of the magnetron sputtering chamber with bolts 2. The bolt head is located in the right hole 13, and the diameter of the bolt head is larger than the diameter of the left hole 12. The threaded section of the bolt is located in the magnetron sputtering chamber. In the wall b of ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides an anti-sagging device for a magnetron sputtering door. The anti-sagging device consists of a support block, and step holes are formed in the support block; the diameter of a right-side hole is larger than that of a left-side hole, an inclined plane is close to the right side on the upper end surface of the support block and is inclined to the lower right corner, and the inclination angle of the inclined plane is 8-15 degrees. When being used, the anti-sagging device is fixed on a wall body of a magnetron sputtering chamber through a bolt, and when the magnetron sputtering door is closed, the lower end of the door moves upwards along the inclined plane to enable the door to be restored to the original position and further achieve a sealing effect. The device has the advantages of simple structure and convenience in use. The magnetron sputtering door is jointly supported by the support block and the bolt, so that the sagging of the magnetron sputtering door can be effectively prevented, and the sealing degree of the magnetron sputtering chamber can be further ensured after the door is closed.
Description
Technical field [0001] The invention relates to an anti-sagging device, in particular to a magnetron sputtering door anti-sagging device. Background technique [0002] Magnetron sputtering coating technology is one of the most widely used technologies in vacuum coating technology. The magnetron sputtering method ionizes inert gases under vacuum conditions, and gas ions bombard metal targets to deposit metal atoms under the action of an electric field. A process technology on the surface of glass. However, in the traditional magnetron sputtering deposition line, since the material of the magnetron sputtering door is metal, the weight of the door will cause the magnetron sputtering door to sag when opened and closed for a long time, and the sealing effect cannot be achieved. Summary of the invention [0003] The technical problem to be solved by the present invention is to provide a magnetron sputtering door anti-sagging device with simple structure and convenient use. [0004] In o...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35
Inventor 章新良
Owner BENGBU RENO VACUUM TECH