A Vacuum Ionization Regulator

A technology for vacuum ionization gauges and tube holders, which is applied in particle separation tubes, air pressure measurement discharge tubes, vacuum gauges using ionization effects, etc., can solve the problems of limited vacuum lower limit and long time, and achieve the effect of improving the lower limit of measurement

Active Publication Date: 2015-12-02
CHENGDU GUOGUANG ELECTRIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current problem of this ionization regulation is that the lower limit of the vacuum is relatively limited during the test, and it reaches 10 during the test. -5 Pa takes longer

Method used

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  • A Vacuum Ionization Regulator
  • A Vacuum Ionization Regulator
  • A Vacuum Ionization Regulator

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Embodiment Construction

[0020] Specific embodiments of the present invention are:

[0021] A vacuum ionization gauge, the vacuum ionization gauge includes a filament, a collector and an accelerating pole, the filament is an iridium filament, the collector is a sheet-shaped collector, and the accelerator is a sheet-shaped "Π"-shaped accelerating electrode , the filament is located between the “∏”-shaped two arms of the sheet-shaped “∏”-shaped accelerating pole, the sheet-shaped rectangular collector surrounds the accelerating pole and the filament on three sides, and the sheet-shaped rectangular collector forms a Two of the three sides are provided with a plurality of circular through holes, one side is provided with a square through hole, and the other side is not enclosed to reduce the area of ​​the collector. Each has an asymmetrical circular through-hole to improve test linearity.

[0022] The vacuum ionization gauge also includes a tube base, a filament support rod, an accelerator support rod an...

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Abstract

The invention relates to a vacuum ionization gauge which comprises filaments, an electron collector and an intensifying ring. The filaments are iridium filaments, the electron collector is a sheet-like electron collector, and the intensifying ring is a sheet-like n-shaped intensifying ring. The filaments are arranged between two n-shaped arms, supporting the n-shaped intensifying ring, of the electron collector, the electron collector surrounds the intensifying ring and the filaments, and the sheet-like electron collector and the intensifying ring are provided with through holes. According to the vacuum ionization gauge, time for crossing one range node in the testing process is reduced by a half, the lower limit of measurement is improved compared with the prior art, and sensibility of the gauge is improved by 25-30%.

Description

technical field [0001] The invention relates to a vacuum ionization gauge, in particular to a vacuum ionization gauge. Background technique [0002] In vacuum measurement, the existing vacuum ionization gauge has the advantages of anti-oxidation, low filament operating temperature, and good linearity. It is a vacuum gauge suitable for working under high pressure, and the typical one is the ZJ-10 ionization vacuum gauge. Tube. However, the current problem of this ionization regulation is that the lower limit of the vacuum is relatively limited during the test, and it reaches 10 during the test. -5 Pa takes a long time. Contents of the invention [0003] The invention provides a vacuum ionization gauge, which can measure relatively low vacuum degree and has high testing sensitivity. [0004] The technical solution of the present invention is: a vacuum gauge, the vacuum gauge includes a filament, a collector and an accelerating pole, the filament is an iridium filament, th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J41/02G01L21/30
Inventor 陈旗
Owner CHENGDU GUOGUANG ELECTRIC
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