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Magnetic head inspection apparatus and magnetic head inspection method

A technology of inspection device and inspection method, applied in the direction of measuring device, magnetic recording head, magnetic head using thin film, etc., to achieve the effect of high-efficiency inspection

Inactive Publication Date: 2013-10-23
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in Patent Document 1, not only the vicinity of the magnetic head element but also the surrounding area is scanned, so scanning takes time.

Method used

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  • Magnetic head inspection apparatus and magnetic head inspection method
  • Magnetic head inspection apparatus and magnetic head inspection method
  • Magnetic head inspection apparatus and magnetic head inspection method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Figure 5 It is a diagram showing a first embodiment in which a scanning range for obtaining a magnetically effective track width is shown based on the above-mentioned basic method of thinking. Figure 6 Indicates that of Example 1 and Figure 4 (b) The corresponding maximum magnetic field strength characteristic curve.

[0047] Example 1 Move in the X direction until the maximum magnetic field intensity curve reaches the maximum value, and then stop scanning. In fact, if Figure 6 As shown, in order to determine the maximum value, that is, to identify a decreasing tendency, further scans were performed several times. according to Figure 6 , the scan line number that produces the maximum value is 36, according to the scan line number 36 and image 3 The corresponding magnetic field strength characteristic curve is used to obtain the magnetic effective track width TW.

[0048] according to Figure 6 , the number of scanning lines in the present embodiment is 37 s...

Embodiment 2）

[0061] Figure 8 It is a diagram showing a second embodiment of limiting the scanning range within the scanning line for obtaining the magnetic effective track width TW.

[0062] The magnetic stripe 1 forms 40 to 60 magnetic heads. If multiple inspections are carried out according to the method of Example 1, then as Figure 9 As shown, the start position S and the end position E within the scan in each magnetic field intensity characteristic curve necessary for obtaining the effective track width TW can be known. Therefore, after a few scanlines, only that range is scanned. In addition, if the magnetic strips 1 are produced in the same batch, the scanning range within the scanning line can also be limited according to the results of other magnetic strips 1 produced in the same batch.

[0063] In Example 2, compared with Example 1, the scan time can be further reduced.

Embodiment 3）

[0065] Figure 10 It is a diagram showing a third embodiment in which the scanning range for obtaining the magnetically effective track width TW is further limited. Example 3 is an example in which the method of thinking of Example 2 is further developed, and the scanning range is narrowed in the same manner as in Example 2 in the flat portion in the X direction.

[0066] In embodiment 3, for two-dimensional scanning, such as Figure 9 As shown, if the start position S and the end position E in the scan are respectively set to 30 and 46, the range of the scan becomes 17, so the scan time can be reduced to For the magnetic strips 1 of the same batch, the thinking method of Embodiment 2 can also be followed.

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Abstract

A signal for excitation is supplied to a connection terminal of a magnetic head. A magnetic probe of a magnetic force microscope is made to fly over the magnetic head and to scan a plurality of scan lines at predetermined intervals in parallel with one side of the magnetic head. A magnetic field strength of the magnetic head is detected to form magnetic field strength profiles of the scan lines. An effective magnetic field strength profile that brings about a magnetic effective track width of the magnetic head is extracted on the basis of a result of detection and the magnetic effective track width of the magnetic head is obtained on the basis of the effective magnetic field strength profile. After extraction of the effective magnetic field strength profile, a scan for obtaining the magnetic effective track width of the magnetic head is stopped.

Description

technical field [0001] The present invention relates to a magnetic head inspection device and a magnetic head inspection method for inspecting a thin-film magnetic head, and more particularly to a magnetic head inspection device and a magnetic head inspection method capable of efficiently inspecting the track width of a thin-film magnetic head that cannot be inspected by an optical microscope. Background technique [0002] Patent Document 1 is known as a technology for inspecting the track width of a thin-film magnetic head. In Patent Document 1, a recording signal (excitation signal) is input to a thin-film magnetic head in the state of a magnetic stripe (row bar) from a bonded area, and a recording signal is generated by the recording head element included in the thin-film magnetic head at a position corresponding to the flying height of the magnetic head. The situation of the magnetic field scans the movement. In addition, direct observation with a Magnetic Force Microsc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/455G11B5/31
CPCB82Y25/00B82Y35/00G11B5/3173G01Q60/54G11B5/455G11B5/3166
Inventor 川本慎治
Owner HITACHI HIGH-TECH CORP
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