Planeness detection and correction all-in-one machine and detection and correction method

A flatness detection, all-in-one technology, used in measuring devices, instruments, optical devices, etc., can solve the problems of unqualified product correction, high manual detection cost, low accuracy, etc., to improve production efficiency, avoid surface Scratch, reduce scrap effect

Active Publication Date: 2013-12-18
深圳市大族半导体装备科技有限公司
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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a flatness detection and correction integrated machine and a correction and detection method for the above-mentioned defects of the prior art, which overcomes the high cost, low efficiency and low accuracy of manual detection, which is easy to cause artificial damage to the product. Damage and existing flatness inspection equipment can only automatically detect whether the product is qualified, but cannot correct defects for unqualified products

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  • Planeness detection and correction all-in-one machine and detection and correction method

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Embodiment Construction

[0028] Now in conjunction with the accompanying drawings, the preferred embodiments of the present invention will be described in detail.

[0029] see figure 1 , figure 2 As shown, the embodiment of the present invention provides a flatness detection and correction integrated machine, including a cabinet assembly 10, a clamp assembly 20 for clamping a modification to be inspected, a control assembly 50 for controlling inspection and correction, and a detection assembly 30. Correction assembly 60 and upper cover assembly 40 . The detection component 30 and correction component 60 are connected with the control component 50 for information exchange to realize the detection and correction of flatness. The detection assembly 30 includes a gantry assembly and a laser displacement sensor 34 for moving in X, Y, and Z axes.

[0030] Such as figure 1 , 2 or 4, the cabinet assembly 10 according to the embodiment of the present invention includes casters 11, foot cups 12, rear outl...

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Abstract

The invention relates to a planeness detection and correction all-in-one machine which comprises a machine cabinet assembly, a fixture assembly for clamping a workpiece to be detected and corrected and a control assembly for controlling the detection and correction. The all-in-one machine further comprises a detection assembly and a correction assembly, wherein the detection assembly comprises a portal frame assembly achieving moving on an X axis, a Y axis and a Z axis and a laser displacement sensor, and the correction assembly comprises a correction mechanism and a contact type digital sensor. The detection assembly and the correction assembly are connected with the control assembly to carry out information interaction to achieve the detection and the correction of the planeness. The planeness detection and correction all-in-one machine can detect whether products are qualified or not, can also carry out correction on sub-quality products, and the effects of improving production efficiency, detection precision and the product percent of pass and reducing cost are achieved.

Description

technical field [0001] The invention relates to the field of flatness detection, in particular to a flatness detection and correction integrated machine and a detection and correction method. Background technique [0002] Flatness refers to the deviation of the macro-concave-convex height of the substrate from the ideal plane. The shells of electronic products and accessories, mechanical processing manufacturing, and electronic product assembly require flatness testing of workpieces during the production process. At present, manufacturers mainly use manual detection methods for detection and correction. Manual detection has low efficiency, low accuracy, poor consistency of result data, and relatively large errors caused by human factors. It will also cause scratches, deformation, distortion and other defects on the product. Affected, even the real measurement value of the product cannot be obtained. Most of the existing flatness testing equipment can only detect whether th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30
Inventor 谢文胜刘涛吴鑫毅巨新亮丁亮陈振余仝敬烁尹建刚
Owner 深圳市大族半导体装备科技有限公司
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