Self-excited vibration principle-based microstructural fatigue test device

Abstract

The invention discloses a self-excited vibration principle-based microstructural fatigue test device which comprises an insulating supporting base, a microtest piece, two direct-current driving electrodes and a substrate, wherein the insulating supporting base is neither connected with any electrode nor grounded, and is in a potential floating state; one end of the microtest piece is fixedly arranged on the insulating supporting base, and the other end is in a horizontal suspension state; a certain clearance is kept between the two direct-current driving electrodes, and the two direct-current driving electrodes are arranged at two sides of the microtest piece and are in parallel to the microtest piece, wherein one direct-current driving electrode is connected into direct-current positive voltage, and the other direct-current driving electrode is connected into direct-current negative voltage; the insulating supporting base and the direct-current driving electrodes are fixedly arranged on the substrate. The self-excited vibration principle-based microstructural fatigue test device is simple in structure, and avoids the problems of being difficult to clamp and align; a large enough low-cycle fatigue test load can be provided without the need of prefabricating a gap on the microtest piece or placing the microtest piece in the vacuum environment; the fatigue tests of a plurality of microtest pieces can be simultaneously performed with relatively low cost, and the load cycle number can be conveniently recorded.

Description

technical field [0001] The invention relates to a microstructure fatigue test device based on the principle of self-excited vibration, which belongs to the field of basic research of micro-nano technology. Background technique [0002] MEMS devices are often subjected to harsh working conditions such as large shocks, large vibrations, and high temperature gradients. At this time, mechanical components such as micro-beams and micro-films in the device will produce excessive deformation and stress-strain, which may cause low-cycle fatigue damage. Therefore, at the beginning of the design of MEMS devices, the low-cycle fatigue of its mechanical parts should be considered, and corresponding low-cycle fatigue tests should be carried out. However, the size of microstructures is so small that traditional large fatigue test devices cannot be loaded, so it is necessary to study new fatigue test devices and methods for microstructures. [0003] Existing microstructure fatigue test de...

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Problems solved by technology

[0004] The technical problem of the present invention is to overcome the deficiencies of the prior art, and provide a microstructure fatigue test device based on the principle of self-excited vibration, which

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