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In-situ varying temperature spectral measurement device in transmission electron microscope

A technology for transmission electron microscopy and spectrum measurement, which is applied in measuring devices, material analysis using wave/particle radiation, instruments, etc., can solve the problem that the temperature of the measured sample cannot be changed in situ, and achieve low cost, easy installation, and practicality strong effect

Active Publication Date: 2014-02-05
INST OF PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] Aiming at the problem that the existing in-situ transmission electron microscope technology cannot change the temperature of the sample to be measured in situ and measure its spectrum, the present invention provides a device for in-situ temperature-variable temperature measurement spectrum in the transmission electron microscope that can solve this problem

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  • In-situ varying temperature spectral measurement device in transmission electron microscope
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Embodiment Construction

[0016] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined arbitrarily with each other.

[0017] Such as Figure 1~2 As shown, the device for in-situ variable temperature measurement spectrum in the transmission electron microscope of this embodiment includes a sample holder 1, a hollow sample rod 2, a hollow interface seat 3, an adiabatic vacuum interface 4, a vacuum electrical connector 5, a vacuum optical fiber flange 6, and a refrigerant Source 7, temperature controller 8 and spectrometer 9, sample holder 1 includes support frame 11, heat conduction block 12, temperature measuring element 13, heating resistance wire 14, cooling tube 15 and optical fiber 16, sample holder 1 is arranged on hollow sample rod 2 At one end, the hollow interface seat 3 is arranged on ...

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Abstract

The invention discloses an in-situ varying temperature spectral measurement device in a transmission electron microscope. A measured sample is cooled through a refrigerant cycle and is heated by heating a resistance wire, the temperature of the measured sample is measured through a temperature measurement element and is controlled through a temperature control instrument, and the temperature of the measured sample is changed and controlled in situ in the transmission electron microscope. Then, the measured sample is bombarded by using electron beams of the transmission electron microscope, namely the spectral quality of the measured sample can be measured under different temperature conditions in situ. Meanwhile, the transmission electron microscope can record the structure and the component information of the measured sample in the process, so that the performance of the measured sample is comprehensively characterized. The problem that the temperature of the measured sample cannot be changed in situ and the spectrum cannot be measured in a conventional in-situ transmission electron microscope technology are solved, transformation of the transmission electron microscope body is not involved, and the device has the advantages of low cost and simplicity in installation and use.

Description

technical field [0001] The invention belongs to the technical field of supporting accessories for transmission electron microscopes, in particular to a device for changing the temperature of a sample to be measured in situ and measuring its spectrum in a transmission electron microscope. Background technique [0002] The in-situ transmission electron microscope technology not only has the structural characterization and component analysis functions of the transmission electron microscope, but also can measure the properties of the sample in situ on the transmission electron microscope. The existing technology can measure the optical, electrical, and mechanical properties of nanomaterials in situ on an electron microscope, but it is not yet possible to change the temperature of the sample under test and measure its spectrum in situ. Contents of the invention [0003] Aiming at the problem that the existing in-situ transmission electron microscope technology cannot change th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/00
Inventor 杨是赜王恩哥田学增许智白雪冬
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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