Unlock instant, AI-driven research and patent intelligence for your innovation.

Evacuate room

A vacuum and vacuum pump technology, applied in the field of evacuation chambers, can solve problems such as noise generation

Active Publication Date: 2016-12-07
EDWARDS LTD
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] It is an object of the present invention to solve or ameliorate the noise generation problems associated with the handling and / or vacuum pumping systems described above

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Evacuate room
  • Evacuate room
  • Evacuate room

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0026] The following description is one embodiment of the present invention, and the present invention is not limited to the description provided below. For example, the present invention can be applied in different industrial applications and is not limited to the semiconductor industry.

[0027] When attempting to reduce the noise level produced by a load lock pump down system, especially during rapid pump down of a load lock at atmospheric pressure, we have found that high noise levels are caused by the deceleration of the load lock pump system, and specifically Caused by the deceleration of the booster pump in the vacuum pumping system. Deceleration is caused by a rapid increase in the gas load on the vacuum pump system that becomes exposed to relatively high pressure gas (typically at or near atmospheric pressure) when the load lock seals and pump down begins (beginning of the load lock cycle) A rapid increase in the gas load on the

[0028] see figure 2, shows a vacu...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A method and apparatus for reducing undesirable noise generated by a vacuum pumping system. The vacuum system operates to reduce the pressure in a chamber to a first pressure value. The system then detects that the pressure at the vacuum pump system's inlet is about to change to a second higher pressure and, in response, the speed of a booster pump in the vacuum pump system is reduced below the rated speed for the pump. When the pressure at the vacuum pump's inlet is above the second pressure, the speed of the booster pump is increased to the rated speed. Thus, the booster pump is slowed down prior the pump system becoming exposed to a rapid increase in inlet pressure.

Description

technical field [0001] The present invention relates to a method and apparatus for evacuating a chamber using a vacuum pump and a booster. Background technique [0002] For example, vacuum pumps are used or required in many industrial applications such as power generation, steel fabrication, and in the semiconductor, solar and flat panel display (FPD) industries. It should be noted that the present invention is not limited to any of these industrial applications. However, for convenience, the invention is described below with reference to the semiconductor, solar, LED (light emitting diode) and FPD manufacturing industries (collectively referred to as semiconductor manufacturing). Of course, the skilled artisan understands that other processes or applications may equally benefit from using the present invention. [0003] Vacuum pumps are generally designed to run at an optimum speed during normal use. The efficiency of a vacuum pump can be improved by using the pump in co...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04F04D27/00
CPCF04D19/042F04D27/0261Y02B30/70Y10T137/86083Y10T137/86139F04B49/06F04B49/20
Inventor P.J.斯蒂芬斯M.G.汤普森
Owner EDWARDS LTD