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Evacuating a chamber

A vacuum and vacuum pump technology, applied in the field of evacuation chambers, can solve problems such as noise generation

Active Publication Date: 2014-02-19
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] It is an object of the present invention to solve or ameliorate the noise generation problems associated with the handling and / or vacuum pumping systems described above

Method used

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  • Evacuating a chamber

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Embodiment Construction

[0026] The following description is one embodiment of the present invention, and the present invention is not limited to the description provided below. For example, the present invention can be applied in different industrial applications and is not limited to the semiconductor industry.

[0027] When attempting to reduce the noise level produced by a load lock pump down system, especially during rapid pump down of a load lock at atmospheric pressure, we have found that high noise levels are caused by the deceleration of the load lock pump system, and specifically Caused by the deceleration of the booster pump in the vacuum pumping system. Deceleration is caused by a rapid increase in the gas load on the vacuum pump system that becomes exposed to relatively high pressure gas (typically at or near atmospheric pressure) when the load lock seals and pump down begins (beginning of the load lock cycle) A rapid increase in the gas load on the

[0028] see figure 2, shows a vacu...

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Abstract

A method for reducing noise generated by a vacuum pumping system 20 operating to evacuate a chamber 10, where the method comprises operating the vacuum pumping system at a rated speed to reduce chamber pressure to a first pressure; determining that the pressure at the vacuum pumping systemâ s inlet is about to change to a second pressure that is higher than the first pressure; in response to the determining step, reducing the speed of a booster pump 28 in the vacuum pumping system to a second speed that is below the rated speed; and then increasing the speed of the booster pump to the rated speed when the pressure at the vacuum pumping systemâ s inlet is above the second pressure. A vacuum pumping system and a method of reducing noise when connected to a semiconductor processing tool is also claimed.

Description

technical field [0001] The present invention relates to a method and apparatus for evacuating a chamber using a vacuum pump and a booster. Background technique [0002] For example, vacuum pumps are used or required in many industrial applications such as power generation, steel fabrication, and in the semiconductor, solar and flat panel display (FPD) industries. It should be noted that the present invention is not limited to any of these industrial applications. However, for convenience, the invention is described below with reference to the semiconductor, solar, LED (light emitting diode) and FPD manufacturing industries (collectively referred to as semiconductor manufacturing). Of course, the skilled artisan understands that other processes or applications may equally benefit from using the present invention. [0003] Vacuum pumps are generally designed to run at an optimum speed during normal use. The efficiency of a vacuum pump can be improved by using the pump in co...

Claims

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Application Information

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IPC IPC(8): F04D19/04F04D27/00
CPCF04D27/004F04D19/042F04D27/0261Y02B30/70Y10T137/86083Y10T137/86139F04B49/06F04B49/20
Inventor P.J.斯蒂芬斯M.G.汤普森
Owner EDWARDS LTD