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Miniature three-dimension electric field sensor based on flexible substrate and preparation method thereof

An electric field sensor and flexible substrate technology, applied in electrostatic field measurement and other directions, can solve problems such as measurement errors, and achieve the effects of accurate measurement accuracy, light weight, and mass production.

Inactive Publication Date: 2014-03-12
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

In actual measurement, since the direction of the electric field to be measured is usually uncertain, the measurement data can only reflect the magnitude of a certain direction component of the three-dimensional vector of the electric field, which is likely to cause measurement errors

Method used

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  • Miniature three-dimension electric field sensor based on flexible substrate and preparation method thereof
  • Miniature three-dimension electric field sensor based on flexible substrate and preparation method thereof
  • Miniature three-dimension electric field sensor based on flexible substrate and preparation method thereof

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Embodiment Construction

[0019] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be noted that, in the drawings or descriptions of the specification, similar or identical parts all use the same figure numbers. Implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art. Additionally, while illustrations of parameters including particular values ​​may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values ​​within acceptable error margins or design constraints.

[0020] The present invention utilizes the foldable property of the flexible substrate 20 to process and fabricate the sensitive unit 1 based on the flexible su...

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Abstract

A miniature three-dimension electric field sensor based on a flexible substrate comprises a flexible substrate, wherein a plurality of sensitive units are formed on the flexible substrate, and the flexible substrate can be folded to realize a three-dimension structure of the electric field sensor. The miniature three-dimension electric field sensor can be used for measuring the three-dimension vector of an electric field, is higher in measurement precision and has the advantages of light weight and small size. In addition, a preparation method of the three-dimension electric field sensor is simple, low in cost and favorable for mass production.

Description

technical field [0001] The present invention relates to the field of micro-electro-mechanical systems (Micro-Electro-Mechanical System, MEMS for short), and in particular to a miniature three-dimensional electric field sensor based on a flexible substrate and a preparation method thereof. Background technique [0002] Electric field sensor is a device for measuring electric field strength and potential. It is widely used in many fields such as national defense, aerospace, weather detection, electric power, earthquake prediction, scientific research and industrial production, and plays a very important role. [0003] Most current electric field sensors are limited to the measurement of one-dimensional vectors. In actual measurement, since the direction of the electric field to be measured is usually uncertain, the measurement data can only reflect the magnitude of a certain direction component of the three-dimensional vector of the electric field, which is likely to cause mea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/12
Inventor 夏善红方奕庚方东明
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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