Alarm processing method of semiconductor technology
An alarm processing and semiconductor technology, applied in the field of semiconductor process equipment control, can solve problems such as termination, production loss, unfavorable equipment protection, etc., to achieve the effect of improving the success rate and reducing losses
Active Publication Date: 2014-05-14
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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However, the defect of this processing method is that, in any case, the processing method after the same alarm information is generated is fixed.
Since the same alarm information has different effects on the process in each process step of the semiconductor processing process, if the same alarm information is treated in the same way in different process steps, such as terminating the process, then the alarm When the information has little impact on the process steps, it will also terminate the process, which is not conducive to the protection of equipment, and will cause production loss and reduce the success rate of the process
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[0027] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings of the specification. Of course, the present invention is not limited to this specific embodiment, and general replacements well known to those skilled in the art are also covered by the protection scope of the present invention.
[0028] figure 1 It is a block diagram of the alarm processing system of the semiconductor process of the present invention; figure 2 This is a flowchart of the alarm processing method of the semiconductor process of the present invention, which will be combined below figure 1 with figure 2 The alarm method and system of the semiconductor process of the present invention will be described.
[0029] The alarm system of the semiconductor technology includes an alarm event group setting module 10, an alarm event analysis module 20, and an alarm event ...
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The invention discloses an alarm processing method of a semiconductor technology. The alarm processing method is used for carrying out corresponding processing on different alarming events generated by all technological steps of the semiconductor processing technology. The alarm processing method comprises the steps of setting up corresponding groups according to different technological steps of all alarming events, wherein in the different technological steps, the same alarming event corresponds to completely different groups; obtaining the group corresponding to the alarming event according to the technological step of the alarming event; carrying out processing according to the processing mode corresponding to the group. The invention further provides an alarm processing system which can differentially treat the same alarming event in different technological steps according to the actual conditions, and the success rate of the semiconductor technology is improved.
Description
Technical field [0001] The present invention relates to the technical field of semiconductor process equipment control, in particular to an alarm processing method for semiconductor process. Background technique [0002] When an abnormal operation of the equipment occurs during the semiconductor process, an alarm message will be issued and corresponding processing will be carried out, so as to achieve the purpose of maintaining process safety and protecting semiconductor equipment. At present, the alarm processing method used in semiconductor processing technology is to set the processing method corresponding to each alarm message through a database file, so that when an alarm message is sent out, it is processed according to the processing method corresponding to the alarm information. However, the disadvantage of this processing method is that, in any case, the processing method after the same alarm message is generated is fixed. Because in each process step of the semiconduct...
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IPC IPC(8): G08B21/00H01L21/67
Inventor 张立超刘建涛钟结实王亚宁
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD