Atomic force microscope probe device

Abstract

The invention discloses an atomic force microscope probe device. The atomic force microscope probe device comprises a probe and a probe base, wherein the probe comprises a micro cantilever and a probe point; the probe point is arranged on one end of the micro cantilever; a slot is formed in the lateral surface of the other end, far from the probe point, of the cantilever; the probe base comprises an absorption part and a location part; the absorption part has an absorption surface; an air conduction slot is formed in the absorption surface and communicated with a vacuumizing part and used for enabling the probe to be absorbed on the absorption surface; the location part comprises a body and a slot patch which is arranged on the lower end of the body; the slot patch is matched with the slot in shape; the body is arranged on two sides of the absorption part in a sliding manner; and the body moves between a first position and a second position to enable the slot patch to be embedded into the slot or separated from the slot. Through the atomic force microscope probe device, the problems that the probe misplaces, falls off or is out of position in the process of replacing the probe can be avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a probe device of an atomic force microscope. Background technique [0002] Nowadays, Atomic Force Microscope (AFM) has been widely used in the testing of semiconductor samples. Its working principle is to detect the extremely weak interatomic interaction between the surface of the sample to be tested and a miniature force-sensitive element (probing needle). To study the surface structure and properties of matter. like figure 1 As shown, generally speaking, the probe 11 includes a needle tip and a micro-cantilever, and one end of the micro-cantilever that is extremely sensitive to weak force is fixed on the probe base 12, and the tiny needle tip at the other end of the micro-cantilever is close to the sample 10, when the needle tip is in contact with the sample (like figure 2 Shown), because there is a very weak force (attraction or repulsion) between their atom...

AI Technical Summary

Problems solved by technology

Because the detection needle is small and light, it increases the operation difficulty of the needle replacement process. During the needle replacement process, it is easy to fail the needle replacement of the detection needle due to the misplacement or drop of the detection needle. At this time, the staff needs to suspend the operation of the machine. Operation, detection and maintenance of the atomic force microscope machine, additional time cost

[0004] It can be seen from the above that in the existing technology, the uncertainty of changing the needle of the atomic force microscope is likely to delay the testing process and increase unnecessary manpower burden

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