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Probe card automatic changing method for wafer acceptance test (WAT)

An automatic replacement, probe card technology, applied in the direction of single semiconductor device testing, etc., can solve the problems of misplaced probe cards, low efficiency, excessive use of probe cards, etc., to balance the frequency of use and avoid the effect of misplaced cards

Active Publication Date: 2014-06-18
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The existing Wafer Acceptance Test (WAT) probe card is manually replaced by the operator according to the type of probe card required by the process method (Recipe). This replacement method is inefficient, and Prone to misplacing probe cards
At the same time, manual replacement of probe cards cannot ensure that the utilization rate of the same type of probe cards remains consistent, and it is easy to cause some probe cards to be overused while other probe cards are idle
Moreover, manual replacement of probe cards has become an obstacle for WAT machines to realize fully automated testing.

Method used

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  • Probe card automatic changing method for wafer acceptance test (WAT)

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Embodiment approach

[0024] In further embodiments of the present invention, please continue to refer to figure 1 shown. Also includes a probe card handling system. If the probe card type on machine 3 is inconsistent with the required probe card type, the card needs to be replaced. In step 3, the probe card handling system will move the probe card replaced in machine 3 to the probe card row ( Stoker) 2, and the probe card transport system transports the required type of probe card to the machine 3.

[0025] In a further embodiment of the present invention, in step 3, when there are multiple cards to choose from for the required type of probe card, the machine automatic replacement system will preferentially select the one with the least cumulative number of tests among the required type of probe cards Probe card, and transport the required type of probe card to machine table 3.

[0026] In a further embodiment of the present invention, in step 4, the test starts after the required probe card is...

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Abstract

The invention discloses a probe card automatic changing method for a wafer acceptance test (WAT). The probe card automatic changing method for the WAT comprises the steps that 1, an automatic dispatching system inquires the probe card type needed by the test by virtue of Recipe when the automatic dispatching system performs dispatching for the WAT; 2, the automatic dispatching system inquires the probe card type on a machine in need of being dispatched, wherein the card does not need to be changed if the probe card type on the machine is consistent with the needed probe card type, and the card needs to be changed if the probe card type on the machine is inconsistent with the needed probe card type; 3, a machine automatic changing system takes out the probe card from the machine, and meanwhile, the machine automatic changing system selects the probe card in the needed type and changes the probe card into the machine; 4, the Lot test begins after the probe card in the needed type is replaced. Automatic changing of the probe card is realized by virtue of the probe card Stoker, a probe card handling system and the automatic changing system, the use frequency of the probe card can be balanced, and the problem of misplacing of a card during manual switch of the card can be effectively avoided.

Description

technical field [0001] The invention relates to the field of semiconductor testing, in particular to a probe card automatic replacement method for wafer acceptability testing. Background technique [0002] The existing Wafer Acceptance Test (WAT) probe cards are manually replaced by the operator according to the type of probe card required by the process method (Recipe). This replacement method is inefficient and It is easy to misplace the probe card. At the same time, manual replacement of probe cards cannot ensure that the utilization rate of the same type of probe cards remains consistent, and it is easy to cause some probe cards to be overused while other probe cards are idle. Moreover, manual replacement of probe cards has become an obstacle for WAT machines to realize fully automated testing. Contents of the invention [0003] In view of the above problems, the present invention provides a method for automatically replacing probe cards for wafer acceptability testi...

Claims

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Application Information

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IPC IPC(8): G01R31/26
Inventor 周波莫保章
Owner SHANGHAI HUALI MICROELECTRONICS CORP