A micromachined accelerometer

Abstract

The invention discloses a micromechanics accelerometer which comprises a chip, connection parts, a plurality of sensitive bodies, wherein a first ligand is fixedly arranged on the chip, and the plurality of sensitive bodies are connected with the chip through corresponding connection parts. A plurality of connection parts are different in rigidity, so that the sensitive bodies can measure accelerated speeds in different ranges. The micromechanics accelerometer integrates the sensitive units which are different in ranges and are nested layer by layer, so that accelerated speeds in different ranges can be measured by corresponding sensitive units. Therefore, accuracy and precision of measurement can be increased effectively by means of the measurement mode. Furthermore, the plurality of sensitive units are nested layer by layer. Accordingly, compared with the existing accelerometer, the micromechanics accelerometer is compact in structure and small in size.

Description

technical field [0001] The invention relates to the technical field of micromechanical inertial instruments, in particular to a micromechanical accelerometer. Background technique [0002] As one of the core components of the micro-inertial measurement combination, the micro-mechanical accelerometer has the characteristics of small size, light weight, low power consumption, low cost, easy integration, strong overload capacity and mass production. and other applications occupy an increasingly prominent position. [0003] Usually, the projectile needs to bear a large acceleration shock in the initial launch stage, but the acceleration during the actual flight is less than tens of g. In order to accurately calculate the flight trajectory of the projectile, it is necessary to measure the acceleration of different g ranges during launch and flight. [0004] High-range accelerometers generally have poor resolution and large measurement errors. Therefore, if a single high-range ...

AI Technical Summary

Problems solved by technology

[0004] The resolution of high-range accelerometers is generally poor, and the measurement error is large

Therefore, if a single high-range accelerometer is used to measure the acceleration of the entire process, there will be a problem of low acceleration measurement accuracy during the low-g flight phase.

However, if the method of combining two accelerometers with different ranges is used, the volume and cost of the accelerometer will increase, and the data alignment between the sensors will also introduce systematic errors

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