Device and method for detecting movement errors of working platform in multiple degrees of freedom

Abstract

The invention discloses a device and a method for detecting movement errors of a working platform in multiple degrees of freedom. Reflected light is reflected onto a three-surface reflector fixed on the working platform through a light path regulation reflector, returns to the light path regulation reflector after being reflected by the three-surface reflector in sequence, is reflected onto a second light splitting piece, enters a beam expanding mirror after being reflected by the second light splitting piece, and is projected onto a detector. Transmission light enters the beam expanding mirror after being transmitted by the second light splitting piece and is projected onto the detector. Two beams of light generate interference on the detector, and measurement on deflection and movement displacement of the working platform can be achieved by regulating shapes of interference fringes and measuring phase displacement. By means of the device and the method for detecting movement errors of the working platform, synchronous and real-time measurement on an angle of oscillation, an angle of pitch and axial movement displacement of the working platform can be performed, real-time compensation is performed according to the measurement result to eliminate effect caused by movement errors, and measurement precision and manufacturing precision can be improved. The angle measurement ranges from +3rad to -3mrad, and measurement requirements of the working platform can be met.

Description

[0001] technical field [0002] The invention relates to a workbench multi-degree-of-freedom detection device, which can realize the synchronous measurement of the workbench's swing angle, pitch angle and linear motion displacement. [0003] Background technique [0004] The precision table is a key component of surface topography measurement and precision machining, and its movement accuracy directly determines the measurement accuracy and machining accuracy. Therefore, research and design are of great significance to the real-time on-line measurement method of the angle deviation and line deviation of the work table. [0005] Among the current measurement methods for the motion error of the workbench, the high-precision measurement method has few degrees of freedom or can only measure a single degree of freedom; in the multi-degree-of-freedom measurement method, the measurement accuracy is low, or a combined measurement method is used The measurement accuracy is high, but...

AI Technical Summary

Problems solved by technology

In addition to the need for strict collimation of the laser beam, this method is difficult to meet the high-precision requirements due to the influence of the laser spot divergence angle and beam drift; the third is other multi-sensor combination measurement methods, including the use of capacitors, gratings and other sensors to measure different parts of the workbench to calculate its motion error. Generally, this method has a complex structure and is only suitable for the research and analysis of the motion error of a special workbench.

And the installation requirements are very high, the environmental requirements are also very strict, and the cost is high

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