An Observation Device for Liquid Bridge Separation Between Parallel Plates

Abstract

The present invention discloses an precise observation apparatus for rapid liquid bridge separation between parallel plates, wherein an upper base plate and a lower base plate are connected through a guide shaft, the lower base plate is fixedly arranged on an observation frame, a movement plate sleeves on the guide shaft to move up and down, the top surface of the lower base plate and the bottom surface of the movement plate are respectively provided with an upper plane flat crystal assembly and a lower plane flat crystal assembly, parallel and coaxial upper plane flat crystal and lower plane flat crystal are fixed on the upper base plate and the lower base plate, a liquid bridge is formed between the upper plane flat crystal and the lower plane flat crystal, a drive assembly is positioned on the top surface of the upper base plate, a tensile force measurement assembly is arranged between the drive assembly and a movement plate assembly, a displacement measurement assembly is arranged on the movement plate, and the side surface and the bottom of the observation frame are provided with high speed cameras. According to the invention, the process of precise observation on rapid liquid bridge separation between parallel plates is achieved, advantages of high parallel plate parallel degree, high separation speed verticality, high measurement precision and the like are provided, and precise observation on contour evolution and capillary force of the liquid bridge between the parallel plates under different separation speed conditions can be achieved, wherein the initial distance between the parallel plates is 100 mum.

Description

technical field [0001] The invention relates to an observation device for a liquid bridge between parallel plates, in particular to an accurate observation device for rapid separation of the liquid bridge between parallel plates. Background technique [0002] Surface tension or capillary force exists widely in nature, industry and daily life, and plays an important role. Especially in the rapidly developing field of MEMS technology, a liquid bridge or liquid film will be formed between two solids that are close to each other, and the capillary force generated by the liquid film or liquid bridge will cause adhesion of the MEMS structure with a small distance , has a significant impact on microscopic manipulation and experimental measurements. [0003] In immersion lithography, the immersion liquid is confined to a gap region of approximately 100 μm between the top of the silicon wafer and the bottom surface of the last projection objective, and maintains a steady and continu...

AI Technical Summary

Problems solved by technology

However, there are few observational studies and corresponding accurate observation devices for the profile evolution of the liquid bridge between micro-pitch parallel plates and the corresponding capillary force change process under different separation speeds, especially fast separation conditions.

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