A dual-axis synchronous and differential motion system and its control compensation method
A compensation method and motion system technology, applied in the direction of program control, computer control, general control system, etc., can solve the problems of low control precision and difficult implementation of control compensation methods, and achieve the effect of high control precision
Active Publication Date: 2016-12-28
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD +1
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Problems solved by technology
[0005] The present invention provides a two-axis synchronous and differential motion system and its control compensation method to solve the problems in the prior art that the two-axis synchronous and differential motion system and its control compensation method are difficult to implement and have low control accuracy
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[0033] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the drawings of the present invention all adopt simplified forms and all use imprecise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.
[0034] The dual-axis synchronization and differential motion system provided by the present invention, such as figure 1 with figure 2 As shown, the driving shaft 100 and the driven shaft 200 are arranged in parallel. The driving shaft 100 and the driven shaft 200 include linear motion units that move in the direction of the driving shaft 100 and the driven shaft 200, respectively. In this embodiment Wherein, the linear motion unit is a motor screw structure, including a DC ...
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The invention relates to a biaxial synchronous and differential motion system and a control compensation method of the system. The system comprises a driving shaft and a driven shaft which are arranged in parallel, wherein the driving shaft comprises a linear motion unit which moves along the driving shaft, the driven shaft comprises a linear motion unit which moves along the driven shaft, a rotating mechanism is further arranged on the driven shaft and comprises a fixed piece, a rotating piece, a first connecting piece and a second connecting piece, the driven shaft is fixed to the fixed piece, the fixed piece, the first connecting piece and the rotating piece are fixedly connected in sequence, the rotating piece is rotationally connected with the second connecting piece, the driving shaft is provided with a detection device for detecting the displacement of the linear motion unit of the driving shaft, and the driven shaft is provided with a detection device for detecting the displacement of the linear motion unit of the driven shaft. The displacement of the driving shaft serves as a feedback signal of the driving shaft; the difference value between the displacement of the driving shaft and the displacement of the driven shaft serves as a feedback signal of the driven shaft, and therefore the driving shaft and the driven shaft can be controlled through a closed loop. When the driving shaft moves, the driven shaft moves along with the driving shaft, and synchronous motion is achieved; when the driving shaft is static, the driven shaft rotates by a small angle, and differential motion between the driving shaft and the driven shaft is achieved.
Description
Technical field [0001] The invention relates to a dual-axis synchronization and differential motion system used in a mask transmission subsystem and a control compensation method thereof. Background technique [0002] At present, although there are many CNC systems with dual-axis synchronous control functions, the development cycle of a CNC system with dual-axis synchronous control functions is long. When performing high-speed and high-precision control, the feedback of the dual-axis and the processing of the feedback must be timely. The system itself generates high requirements. For many domestic CNC systems, due to the limitation of the interpolation cycle, it is quite difficult to implement dual-axis synchronous control technology on the CNC system. [0003] The existing method is a mode that combines a synchronous controller or a control card with a numerical control system. Due to the powerful functions of the synchronous controller or control card, the resources of the contr...
Claims
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IPC IPC(8): G05B19/404
Inventor 黄春霞田翠侠
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD