Self-calibrating method of two-dimensional large-stroke precision workbench measuring system

Abstract

The invention relates to a self-calibrating method of a two-dimensional large-stroke precision workbench measuring system and belongs to the field of precision machining and measurement. The self-calibrating principle is utilized for the method, a glass plate with even grids is used as an auxiliary measuring device, a two-dimensional workbench is self-calibrated respectively according to areas, and system errors of all the areas are obtained; system error compensation is performed on the corresponding areas, and coordinates of discrete points in calibration coordinate systems are obtained; linear fitting is performed on the coordinates of the discrete points in all the areas, and grids of the calibration coordinate systems are obtained; on the basis of the coordinate system transformation principle, the calibration coordinate systems of the adjacent areas are transformed, a unified calibration coordinate system in the whole area is obtained, and finally the two-dimensional large-stroke precision workbench measuring system can be self-calibrated. Through the self-calibrating method, large-stroke and high-precision self-calibration of the two-dimensional workbench is achieved, and meanwhile the function of calibrating the high-precision two-dimensional workbench through the low-precision grid glass plate is achieved. A high-precision calibrating tool is not needed, and the self-calibrating method is high in calibration precision and suitable for calibrating various two-dimensional precision workbenches.

Description

technical field [0001] The invention relates to a self-calibration method of a two-dimensional large-stroke high-precision workbench measurement system, belonging to the field of ultra-precision machining and measurement. Background technique [0002] With the rapid development of ultra-precision machining, the application of ultra-precision worktables in the field of precision engineering is becoming more and more extensive. At the same time, the requirements for the measurement accuracy of multi-dimensional workbench are getting higher and higher. ), its multi-dimensional measurement accuracy often needs to reach the nanometer level or even sub-nanometer level. However, due to the influence of factors such as manufacturing and assembly process, non-centroid drive and feedback measurement components (such as the flatness of the laser interferometer mirror and its adjustment), the measurement system of the workbench inevitably has systematic errors (using G m,n means, such ...

AI Technical Summary

Problems solved by technology

However, for the actual object to be calibrated, it may be a large workbench area, or a non-square area such as a rectangle, and the traditional self-calibration method cannot easily obtain the required large-scale system error G m,n , and the current self-calibration method does not have an effective method for large-stroke and large-scale workbench calibration, and the original self-cali

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