The invention discloses an extremely high vacuum gauge calibration device and a method, belonging to measurement field. The device comprises an extremely high vacuum gauge, an extremely high vacuum calibration room, a first valve, a vacuum gauge to be calibrated, a small hole, a second valve, a third valve, a high-precision vacuum gauge, an extremely high vacuum aspirating chamber, an extremely high vacuum air-bleed set, a flow limiting hole, a pressure stabilizing chamber, a non-evaporable getter pump, an air source, a micrometering valve, a flowmeter air-bleed set and a fourth valve, and the peripheral equipment includes a heating device. With the device and the method disclosed by the invention, the measurement uncertainty is small, accurate calibration to the extremely high vacuum gauge within the pressure range smaller than 10<-9>Pa can be realized, and the flow measurement range is expanded.