Calibration device and calibration method of white light interference atomic-power scanning probe

Abstract

The invention discloses a calibration system and calibration method of a white light interference atomic-power scanning probe based on contact measurement. The calibration system comprises a face CCD measurement system, an atomic-power probe scanning microscope module, a white light source system, a nanoscale vertical micro-displacement platform, a laser interference displacement metering system and a data processing system, wherein the face CCD measurement system, the white light source system and the atomic-power probe scanning microscope module are fixed to the nanoscale vertical micro-displacement platform, displacement is produced by receiving a control instrument of a main control machine, and accordingly a probe in the atomic-power probe scanning microscope module deforms. The laser interference displacement metering system is arranged on the nanoscale vertical micro-displacement platform and used for metering the displacement of the nanoscale vertical micro-displacement platform acting on the probe. By means of the calibration method, quick high-accuracy calibration can be achieved.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision surface topography measurement, and more specifically relates to a calibration system and a calibration method of a white light interference atomic force scanning probe based on contact measurement. Background technique [0002] The measurement principle of white light interference atomic force microscopy is to deform the atomic force probe according to the van der Waals force between atoms, so as to achieve the purpose of measurement, while the tip of the atomic force scanning probe is equivalent to an atom, and it will be consistent with the workpiece to be measured during measurement. Atoms on the surface interact with each other. The white light interference atomic force scanning microscope is to let the white light interference system form white light interference fringes on the atomic force scanning probe. When the van der Waals force is generated between the tip atoms and the surfac...

AI Technical Summary

Problems solved by technology

[0003] The atomic force scanning probe can be regarded as a cantilever beam. According to the mechanics of materials, the atomic force scanning probe will undergo flexible deformation after being stressed, so the height between each position of the atomic force scanning probe and the workpiece is not a specific Linear or fixed corresponding relationship, so if the measurement is calculated according to a fixed relationship, the measurement result will have a large deviation

And because the fixing method of the probe cannot be guaranteed to be completely consistent, the direction of the force is not completely perpendicular to the needle tip, so if the calibration of the probe is only carried out according to the theoretical calculation, there will be a relatively large error

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