Calibration device and method for calibrating vacuum gauge by using vacuum leak hole

A technology for vacuum leaks and calibration devices, applied in measuring devices, instruments, measuring fluid pressure, etc., can solve the problems of long calibration cycle, cumbersome operation, and cumbersome calibration operation, and achieve the effect of accurate calibration, simple operation and high efficiency

Active Publication Date: 2020-06-02
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The structure of the static expansion method calibration device is complicated, and the calibration operation is cumbersome. The calibration process requires repeated operations and vacuuming. The operation is cumbersome, the calibration period is long, and the calibration device is expensive.

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  • Calibration device and method for calibrating vacuum gauge by using vacuum leak hole
  • Calibration device and method for calibrating vacuum gauge by using vacuum leak hole
  • Calibration device and method for calibrating vacuum gauge by using vacuum leak hole

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Embodiment Construction

[0023] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0024] The invention provides a calibration device for calibrating a vacuum gauge with a vacuum leak, such as figure 1 As shown, it includes a gas supply system, a plenum chamber 8, a vacuum leak 10, a calibration chamber 12 and an air extraction system.

[0025] Among them, the gas supply system is composed of high-pressure gas cylinders 1, 3, 5, valves 2, 4, 6 and pipelines. The bottle can provide three different single gases;

[0026] The plenum 8 is connected to the inlet port of the vacuum leak 10 through the valve 9, and connected to the pumping system through the valve 14; the pressure gauge 7 is connected to the plenum 8 for measuring the pressure of the gas in the plenum 8;

[0027] The gas outlet port of the vacuum leak hole 10 is connected to the calibration chamber 12 through the valve 11, and the vacuum gauge 13 to be calibrated is connected...

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Abstract

The invention discloses a calibration device and method for calibrating a vacuum gauge by using a vacuum leak hole. The device is composed of the vacuum leak hole, a stop valve, a pressure gauge, a calibrated vacuum gauge, an air pumping system, a pressure stabilizing chamber, a calibration chamber and an air supply system. When a gas flowing out of the vacuum leak hole with the known leak rate enters the calibration chamber, the gas in the calibration chamber generates the standard pressure through the accumulation for a period of time, and by comparing the standard pressure and the reading of the calibrated vacuum gauge, the calibrated vacuum gauge is calibrated. Compared with a conventional static expansion method, the device and the method have the advantages that the operation is simple, the efficiency is high, and the accurate calibration of different gases on the vacuum metering range width can be realized through one leakage hole.

Description

technical field [0001] The invention relates to the technical field of vacuum calibration, in particular to a calibration device and method for calibrating a vacuum gauge with a vacuum leak hole. Background technique [0002] The static expansion vacuum calibration method is a commonly used method for static calibration of vacuum gauges. The calibration process generally adopts the method of expanding the gas from the small volume of the sampling chamber to the large volume of the calibration chamber to attenuate the standard pressure to realize the calibration of the vacuum gauge. In order to extend the calibration lower limit to 10 -4 Pa, adopts the methods of primary expansion, secondary expansion and tertiary expansion. The structure of the static expansion method calibration device is complicated, and the calibration operation is cumbersome. The calibration process requires repeated operations and vacuuming. The operation is cumbersome, the calibration period is long, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L27/00
CPCG01L27/002G01L27/005
Inventor 赵澜孙雯君郭美如管保国张瑞芳马亚芳刘珈彤
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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