Calibration device and method for calibrating vacuum gauge by using vacuum leak hole
A technology for vacuum leaks and calibration devices, applied in measuring devices, instruments, measuring fluid pressure, etc., can solve the problems of long calibration cycle, cumbersome operation, and cumbersome calibration operation, and achieve the effect of accurate calibration, simple operation and high efficiency
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[0023] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0024] The invention provides a calibration device for calibrating a vacuum gauge with a vacuum leak, such as figure 1 As shown, it includes a gas supply system, a plenum chamber 8, a vacuum leak 10, a calibration chamber 12 and an air extraction system.
[0025] Among them, the gas supply system is composed of high-pressure gas cylinders 1, 3, 5, valves 2, 4, 6 and pipelines. The bottle can provide three different single gases;
[0026] The plenum 8 is connected to the inlet port of the vacuum leak 10 through the valve 9, and connected to the pumping system through the valve 14; the pressure gauge 7 is connected to the plenum 8 for measuring the pressure of the gas in the plenum 8;
[0027] The gas outlet port of the vacuum leak hole 10 is connected to the calibration chamber 12 through the valve 11, and the vacuum gauge 13 to be calibrated is connected...
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