Micro-flow calibration device and method of double-channel symmetrical structure

Abstract

The invention discloses a micro-flow calibration device and method of a double-channel symmetrical structure. The device is composed of gas supply systems, stop valves, a needle valve, pressure gauges, monitoring pressure gauges, a pumping system, a flow calibration chamber, a flow comparison chamber, temperature collecting systems, a volume compensation system and micro flow measurement instruments; through pipeline connection, two channels which are symmetrically arranged on the left and right are built, the shapes of the symmetrical channels are symmetrical, and the geometrical dimensions of the symmetrical channels are the same. Through staged measurement in combination with the volume compensation system, effects of outlet pressure, the gas types and the temperatures on measurement are reduced to the minimum, so that precise calibration of the micro-flow measurement instruments under the different outlet pressure, in the different gas and at the different temperatures is achieved.

Description

technical field [0001] The invention relates to a micro-flow calibration device and method with a double-channel symmetrical structure, belonging to the field of measurement. Background technique [0002] As an instrument for gas micro-flow measurement and control, micro-flow measuring instruments are widely used in aerospace, aviation, electronics, nuclear energy, semiconductor microelectronics industry, special material development, chemical industry, petroleum industry, medicine, environmental protection and vacuum, etc. Research and production in various fields. In order to ensure the reliability of micro-flow measurement, many laboratories at home and abroad have established standard devices for calibrating micro-flow. The calibration methods used mainly include constant volume method, constant pressure method, and flowmeter comparison method. The constant volume method is to introduce the calibrated flow out of the micro flow measuring instrument directly into the con...

AI Technical Summary

Problems solved by technology

The above three methods are mainly applied to the condition that the outlet pressure of the micro-flow measuring instrument is vacuum, and the precise calibration of the micro-flow measuring instrument under the condition of the rated outlet pressure has not been solved; and the above methods do not consider the flow temperature correction of the micro-flow measuring instrument. The calibrated flow during use refers to the flow value under certain temperature conditions

Images